Effect of Pd addition on Ni-induced lateral crystallization and poly-Si TFTs

Electrochemical and Solid-State Letters

Volumn 7, Issue 8, 2004, Pages

  Yoon, Yeo Geon ^a   Kim, Byoung Dong ^a   Kim, Min Sun ^a   Choi, Seong Hee ^a   Joo, Seung Ki ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; DEGRADATION; LEAKAGE CURRENTS; MICROSTRUCTURE; MORPHOLOGY; NICKEL; PALLADIUM; THIN FILM TRANSISTORS; THIN FILMS;

ION MASS DOPING SYSTEMS; METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); REACTIVE ION ETCHING (RIE);

POLYSILICON;

EID: 4344689084     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1756861     Document Type: Article

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