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Volumn 299-302, Issue PART 1, 2002, Pages 83-86
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Growth of large-grain poly-Si by FE-SMC
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
ANNEALING;
CRYSTAL GROWTH;
CRYSTAL STRUCTURE;
CRYSTALLIZATION;
ELECTRIC FIELD EFFECTS;
GRAIN SIZE AND SHAPE;
NICKEL;
THERMAL EFFECTS;
SILICIDE MEDIATED CRYSTALLIZATION (SMC);
POLYSILICON;
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EID: 0036539118
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)01181-4 Document Type: Conference Paper |
Times cited : (24)
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References (9)
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