Removal of thick (>100 nm) InGaN layers for optical devices using band-gap-selective photoelectrochemical etching

Applied Physics Letters

Volumn 85, Issue 5, 2004, Pages 762-764

  Haberer, E D ^a   Sharma, R ^a   Stonas, A R ^a   Nakamura, S ^a   Denbaars, S P ^a   Hu, E L ^a  

^a Santa Barbara   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONFINEMENT; PHOTOELECTROCHEMICAL (PEC) ETCHING; PHOTONIC CRYSTAL MEMBRANES; PIEZOELECTRIC FIELDS;

CARRIER CONCENTRATION; DIFFUSION; ELECTROCHEMISTRY; ELECTROLYTES; ENERGY GAP; EPITAXIAL GROWTH; GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL DEVICES; PHOTOCHEMICAL REACTIONS; PIEZOELECTRICITY; POLARIZATION; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR SUPERLATTICES;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 4344679116     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1776615     Document Type: Article

References (14)

1. C Youtsey, L. T. Romano, and I. Adesida, Appl. Phys. Lett. 73, 797 (1998).
2. C. Youtsey, L. T. Romano, R. J. Molnar, and I. Adesida, Appl. Phys. Lett. 74, 3537 (1999).
3. A. T. Ping, D. Selvanathan, C. Youtsey, E. Piner, J. Redwing, and I. Adesida, Electron. Lett. 35, 2140 (1999).
4. L. Won Sang, C. Yoon Ho, C. Ki Woong, S. Moo Whan, and M. Dong Chan, Mater. Res. Soc. Symp. Proc. 572, 481 (1999).
5. A. R. Stonas, N. C. MacDonald, K. L. Turner, S. P. DenBaars, and E. L. Hu, J. Vac. Sci. Technol. B 19, 2838 (2001).
6. R. P. Strittmatter, R. A. Beach, and T. C. McGill, Appl. Phys. Lett. 78, 3226 (2001).
7. Y. Gao, A. R. Stonas, I. Ben-Yaacov, U. Mishra, S. P. DenBaars, and E. L. Hu, Electron. Lett. 39, 148 (2003).
8. M. S. Minsky, A. M. White, and E. L. Hu, Appl. Phys. Lett. 68, 1531 (1996).
9. C. Youtsey, G. Bulman, and I. Adesida, J. Electron. Mater. 27, 282 (1998).
10. C. Youtsey, I. Adesida, and G. Bulman, Electron. Lett. 33, 245 (1997).
11. A. R. Stonas, T. Margalith, S. P. DenBaars, L. A. Coldren, and E. L. Hu, Appl. Phys. Lett. 78, 1945 (2001).
12. P. Visconti, M. A. Reshchikov, K. M. Jones, D. F. Wang, R. Cingolani, H. Morkoc, R. J. Molnar, and D. J. Smith, J. Vac. Sci. Technol. B 19, 1328 (2001).
13. The 1D Poisson solver was developed by Professor G. Snider, Notre Dame University, Notre Dame, IN.
14. V. Fiorentini, F. Bernardini, and O. Ambacher, Appl. Phys. Lett. 80, 1204 (2002).