Quantitative texture analysis of free-standing electrodeposited Cu- and Ni-line patterns

Acta Materialia

Volumn 52, Issue 16, 2004, Pages 4929-4940

  Pantleon, Karen ^a   Somers, Marcel A J ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Electroplating; Epitaxy; Texture; Thin films; X ray diffraction

Indexed keywords

CRYSTALLOGRAPHY; ELECTRODEPOSITION; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NICKEL; POLYCRYSTALLINE MATERIALS; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

COPPER FILMS; CRYSTALLOGRAPHIC TEXTURES; FIBER TEXTURES; MICROSYSTEMS;

COPPER;

EID: 4344651230     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2004.07.001     Document Type: Article

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