Deformation field in single-crystal fields semiconductor substrates caused by metallization features

Applied Physics Letters

Volumn 74, Issue 16, 1999, Pages 2352-2354

  Noyan, I C ^a   Wang, P C ^a   Kaldor, S K ^a   Jordan Sweet, J L ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; FLUORESCENCE; NICKEL; POLYCRYSTALLINE MATERIALS; SILICON WAFERS; SINGLE CRYSTALS; STRAIN; THIN FILMS; X RAY CRYSTALLOGRAPHY;

X-RAY MICRODIFFRACTION ANALYSIS;

METALLIC FILMS;

EID: 0032621082     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123848     Document Type: Article

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