Deposition of preferred-orientation ZnO films on the ceramic substrates and its application for surface acoustic wave filters

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1087-1092

  Chu, Sheng Yuan ^a   Chen, Te Yi ^a   Water, Walter ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b TUNG NAN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHAMBER PRESSURE; ELECTROMECHANICAL COUPLING; GAS FLOW RATIO; RF MAGNETRON SPUTTERING METHOD;

ACOUSTIC SURFACE WAVE FILTERS; ARGON; ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; MORPHOLOGY; OXYGEN; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; SURFACE PHENOMENA; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ZINC OXIDE;

EID: 4344573156     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1738653     Document Type: Article

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