Influence of leaky surface acoustic wave velocity of glass substrates on frequency variation of ZnO/glass SAW filters

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 817-822

  Kadota, Michio ^a   Kitamura, Takeshi ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; ELASTICITY; GLASS; SUBSTRATES; ULTRASONIC DEVICES; ZINC OXIDE;

FREQUENCY DISTRIBUTION; GLASS SUBSTRATES; ULTRASONIC MICROSCOPE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0032691464     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775645     Document Type: Article

References (9)

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3. M. Kadota, C. Kondo, T. Ikeda, and T. Kasanami, "Frequency trimming of ZnO/glass SAW filters," Jpn.J. Appl. Phys., vol. 30, suppl. 30-1, pp. 179-180, 1991.
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6. M. Kadota.T. Kasanami, T. Ikeda, and C. Kondo, "Evaluation of frequency for ZnO/glass-substrate SAW filters,': 1EICE Japan, Tech. Rep. US88-63, Jan. 1989, pp. 9-1C (in Japanese).
7. N. Chubachi, J. Kushibiki, M. Kadota, and T. Kasanami, "Evaluation of substrates for SAW devices with acoustic microscopy," Tech. Rep. presented at the 16th Mtg. of 150th Comm. for Acoust. Wave Technol. Zao, Japan, Oct. 1988 (in Japanese).
8. J. Kushibiki and N. Chubachi, "Material characterization by line-focus-beam acoustic microscope," IEEE Trans. Sonics Ultrason., vol. SU-32. no. 2, pp. 189-212, Mar. 1985.
9. J. Kushibiki, T. Ucda, and N. Chubachi, "Determination of elastic constants by LFB acoustic microscope,'' Proc. IEEE Ultrason. Symp., Oct. 1987, pp. 817-821.