Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO3/SiO2 and quartz/SiO2 structures

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 1, 2001, Pages 268-273

  Herrmann, Falle ^a,b,c   Weihnacht, Manfred ^a   Büttgenbach, Stcphanus ^a  

^a BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

^b Institute Cor Solid State and Materials Research   (Germany)

^c TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY OF LIQUIDS; LITHIUM COMPOUNDS; QUARTZ; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; THERMODYNAMIC STABILITY; VISCOSITY OF LIQUIDS;

TEMPERATURE-COMPENSATED SYSTEMS;

ACOUSTIC SURFACE WAVE DEVICES;

ARTICLE;

EID: 0034745862     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.896139     Document Type: Article

References (20)

1. H. Ii. Hager, "Fluitl property evaluation by piezoelectric crystals operating in the thickness shear mode," Chern. Eny. Commun., no. 43, pp. 25-B8, 1986.
2. J. Kondoh and S. Shiokawa, "Measurements of conductivity and pll of liquid using surface acoustic wave devices," Jpn. J. Appl. Phys., (Suppl. 31-1), pp. 82-84, 1992.
3. S. J. Martin, A. J. Ricco, T. M. Niemczyk, and G. C. Frye, "Characterization of SH acoustic plate mode liquid sensors," Sens. Actuators, vol. 20, pp. 253 268, .1989.
4. G. Kovacs, M. J. Vellokoop, R. Haneis, G. W. Lubking, and A. Veneina, "A Love wave sensor for (hio)chemical sensing in liquids," Sens. Actuators A, vol. 43, pp. 38-43, 1994.
5. G. Kovacs and A. Venema, "Theoretical comparison of sensitivities of acoustic shear wave modes for (bio)chemical sensing in liquids," Appl. Phys. Leu., vol. 61, no. 6, pp. 639-641, 1992.
6. E. Gizeli, N. J. Goddard, C. R. Lowe, and A. C. Stevenson, "A Love plate biosensor utilising a polymer layer," Sens. Actuators B6, pp. 131-137, 1992.
7. T. Nishiskawa, A. Taiii, and O. Takeuchi, "SH-typc surface acoustic waves on rotated Y-cut quartz," Fujitsu, Scient. & Tech. .J., no, 12, pp. 99-113, 1981.
8. K. Nakamnra, M. Kazumi, and H. Sliimizu, "Sil-type and Hayleigh-type surface waves on rotated Y-cul LiTaO.i," in 1'roc. IEEK Uttmson. Symp., 1Q77, pp. H19-822.
9. B. A. Auld, Acoustic Fields and Waves in Solids, vol. 11, 2nd éd. Malabar: R.E. Krieger PC, 1990.
10. J. Du, G. L. Harding, ,f. A, Ogilvy, P, R, Dencher, and M. Lake, "A study of Love-wave acoustic sensors,1 fjens. Actuators A, vol. 56, pp. 211-219, 1990.
11. J. Du and G. L. Hording, "A multilayer structure for Love-mode acoustic sensors," Sens. Actuators A, vol. 65, pp, 152-159, 1998.
12. F. Herrmaim and S. BuUgenbach, "Temperature-compensated shear-horizontal surface acoustic waves in layered quartz/SiU2stractiires," Phys. Slat. Soi, vol. 170, no. 2, pp. R3 R4, 1998.
13. B. Jakoby and M. J. Vellckoop, "Reducing the temperature sensitivity of Love-wave sensors,'1 in Proc. IEEE Ultrason. Syiit.p., 1998, pp. 447-450.
14. K. Yamanouchi, K. hvahashi, and K. Shibayama, "Temperature dependence of Rayleigh waves and piezoelectric: leaky surface waves in rotated Y-cut LiTaOu and SiU2/LiTaO:istructurcs," Wave Electronics, vol. 3, pp. 319-333, 1979.
15. F. llerrmanri, M. Weihnacht, and S. Biittgenbiich, "Properties of shear-horizontal surface acoustic waves in different layered quartz/SiO2-structures," Ultrasonics, vol. 37, no. 5, pp. 335341, 1999.
16. R. Wobst, "The generalized eigenvalue problem and acoustic surface wave computations," Computing, vol. 39, pp. 57 f>9, 1987.
17. B. Jakoby and M. J. Vellekoop, "Properties of Love waves: Applications in sensors," Smart Mater. Struct., vol. 6, pp. 068-679, 1997.
18. W. R. Smith, H. M. Gérard, J, H. Collins, T. M. Reeder, and H. J. Shaw, "Analysis of interdigital surface wave transducers by use of an equivalent circuit model," IEEE/ Trans. Microwave. The.ory Tech., vol. 17, no. 11, pp. 850 864, 19f>9.
19. S. Datta, Surface Acoustic. Wave Devices. Englcwood Cliffs: Prentice-Hall, 1986.
20. |20] Z. Wang, J.D.N. Cheeke, and C. K. Jen, "Sensitivity analysis for Love mode acoustic gravimetric sensors," Appl, Pkys. l,c.tt., vol. 64, no. 22, pp. 2940-2942, 1994.