Preparation of piezoelectric ZnO films by target facing type of sputtering method

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 207-212

  Hashimoto, Ken ya ^a   Ogawa, Shotaro ^a   Nonoguchi, Akinori ^a   Omori, Tatsuya ^a   Yamaguchi, Masatsune ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; GLOW DISCHARGES; PIEZOELECTRIC MATERIALS; PLASMA DENSITY; SPUTTERING; ZINC OXIDE;

TARGET FACING TYPE OF SPUTTERING (TFTS) METHOD;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0032270842     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)