SAW characteristics in a layered ZnO/GaAs structure for design of integrated SAW filters

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 261-264

  Zhang, Victor Y ^a   Lefebvre, J E ^a   Gryba, T ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC PROPERTIES; ACOUSTIC TRANSDUCERS; ACOUSTIC WAVE VELOCITY; ELECTRODES; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; ZINC OXIDE;

FILM POLARITY ORIENTATION; FILM THICKNESS; INTER-ELECTRODE REFLECTIVITY; INTERDIGITAL TRANSDUCER;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0035728777     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Surface waves in piezoelectrics
2. Analysis of generation and detection of surface and bulk acoustic waves by interdigital transducers
3. A unified formalism using effective surface permittivity to study acoustic waves in various anisotropy and piezoelectric multilayers
4. 3 structure