Fluid description of non-local electron kinetics in inductively coupled plasmas

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Hagelaar, G J M ^a  

^a d'Hydraulique et des Telecommunications   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELEMENTARY PARTICLES; FLUID DYNAMICS; INDUCTIVELY COUPLED PLASMA; MAXWELL EQUATIONS; MOMENTUM; SCALING LAWS; VISCOSITY;

ELECTRON KINETICS; PARTICLE IN CELL MODELS; PONDEROMOTIVE FORCES; POWER ABSORPTION; SEMI INFINITE PLASMA; STOCHASTIC HEATING; THERMAL MOTION;

KINETIC THEORY;

EID: 43149099226     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/025017     Document Type: Article

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