Oscillations of sputtering yield

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 171, Issue 4, 2000, Pages 435-442

  Eckstein, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HEAVY IONS; ION BOMBARDMENT; ION IMPLANTATION; MONTE CARLO METHODS; OSCILLATIONS;

FLUENCE-DEPENDENT DEPTH PROFILES;

SPUTTERING;

EID: 0034543970     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00321-9     Document Type: Article

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