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Journal of Applied Physics

Volumn 103, Issue 8, 2008, Pages

Resolution degradation caused by multispur effect in chemically amplified extreme ultraviolet resists

(3) Kozawa, Takahiro a Tagawa, Seiichi a Shell, Melissa b

a OSAKA UNIVERSITY (Japan)

b INTEL CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COULOMB BLOCKADE; IONIZATION; MONTE CARLO METHODS; PHOTOELECTRONS; ULTRAVIOLET RADIATION;

ION PAIRS; MULTISPUR EFFECTS; RESOLUTION DEGRADATION;

ION BOMBARDMENT;

EID: 43049114581 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2909275 Document Type: Article

Times cited : (56)

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