Preparation of diamond like carbon thin films above room temperature and their properties

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 680-683

  Aryal, Hare Ram ^a   Adhikari, Sudip ^a   Ghimire, Dilip Chandra ^a   Kalita, Golap ^a   Umeno, Masayoshi ^a  

^a CHUBU UNIVERSITY   (Japan)

Author keywords

DLC; FT IR; Substrate temperature; Surface wave plasma

Indexed keywords

DIAMOND LIKE CARBON FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON COMPOUNDS; SURFACE WAVES;

DIAMOND LIKE CARBON THIN FILMS; ROOM TEMPERATURE; SUBSTRATE TEMPERATURE; SURFACE-WAVE PLASMAS;

THIN FILMS;

EID: 42949152003     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.007     Document Type: Article

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