Photovoltaic characteristics of boron-doped hydrogenated amorphous carbon on n-Si substrate prepared by r.f. plasma-enhanced CVD using trimethylboron

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 687-690

  Hayashi, Y ^a   Ishikawa, S ^a   Soga, T ^a   Umeno, M ^b   Jimbo, T ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b CHUBU UNIVERSITY   (Japan)

Author keywords

Boron dope; Diamond like carbon; Photovoltaic characteristics; R.f. plasma enhanced CVD

Indexed keywords

DOPING (ADDITIVES); FABRICATION; HYDROGENATION; LIGHT ABSORPTION; PARTIAL PRESSURE; PHOTOCURRENTS; PHOTOVOLTAIC EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS; THIN FILMS;

OPTIMAL DOPING;

AMORPHOUS MATERIALS;

DIAMOND;

EID: 0038529378     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00031-1     Document Type: Article

References (11)

1. Krishna, K. M., Umeno, M., Nukaya, Y., Soga, T., & Jimbo, T. (2000). Appl. Phys. Lett.. 77 1472.
2. Kojima, N., Yamaguchi, M., & Ishikawa, N. (2000). Jpn. J. Appl. Phys.. 39 1176.
3. Robertson, J., & O'Reilly, E. P. (1987). Phys. Rev. B. 35 2946.
4. Amaratunga, G. A., Veerasamy, V. S., & Davis, C. A. (1993). J. Non-Cryst. Solids. 164-166 1119.
5. Konofaos, N., & Thomas, C. B. (1997). J. Appl. Phys.. 81 6238.
6. Yu, Y. H., Chen, Z. Y., & Luo, E. Z. (2000). J. Appl. Phys.. 87 2874.
7. Narayanan, K. L., & Yamaguchi, M. (1999). Appl. Phys. Lett.. 75 2106.
8. Anguita, J. A., Silva, S. R., & Young, W. (2000). J. Appl. Phys.. 88 5175.
9. Hayashi, Y., Ishikawa, S., Soga, T., Jimbo, T., Adachi, M., & Umeno, M. (2002). Int. J. Mod. Phys. B. 16 1096.
10. Knigh, D. S., & White, W. B. (1989). J. Mater. Res.. 4 385.
11. Krishna, K. M., Ebisu, H., & Hagimoto, K. (2001). Appl. Phys. Lett.. 78 294.