Structural analysis of In/Ag, In/Cu and In/Pd thin films on tungsten by ellipsometric, XRD and AES methods

Applied Surface Science

Volumn 254, Issue 14, 2008, Pages 4401-4407

  Wronkowska, A A ^a   Wronkowski, A ^a   Bukaluk, A ^a   Trzcinski, M ^a   Okulewicz, K ^a   Skowronski L ^a  

^a UNIVERSITY OF TECHNOLOGY AND LIFE SCIENCES   (Poland)

Author keywords

Auger electron spectroscopy; Interdiffusion; Intermetallic compounds; Scanning electron microscopy; Spectroscopic ellipsometry; X ray diffractometry

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DIELECTRIC MATERIALS; ELLIPSOMETRY; INTERMETALLICS; SURFACE MORPHOLOGY;

DIELECTRIC FUNCTIONS; ROOM TEMPERATURE;

THIN FILMS;

EID: 42649122586     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.01.006     Document Type: Article

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