Structural analysis of Cu-In alloy films with XPS depth profiling by ion etching

Vacuum

Volumn 74, Issue 3-4 SPEC. ISS., 2004, Pages 591-594

  Nakano, Takeo ^a   Sato, Shogo ^a   Baba, Shigeru ^a  

^a SEIKEI UNIVERSITY   (Japan)

Author keywords

Copper; Depth profile; Evaporation; Indium; Island structure; X ray photoelectron spectroscopy

Indexed keywords

COPPER ALLOYS; DEPOSITION; EVAPORATION; INDIUM ALLOYS; MOLYBDENUM; REACTIVE ION ETCHING; STRUCTURAL ANALYSIS; ULSI CIRCUITS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILES; ISLAND STRUCTURES;

THIN FILMS;

EID: 2442516031     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.031     Document Type: Article

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