Ellipsometric and AES investigation of thin polycrystalline In/Cu and In/Ag couples

Vacuum

Volumn 74, Issue 2, 2004, Pages 163-167

  Wronkowska, A A ^a   Arwin, H ^b   Trzcinski M ^a   Wronkowski, A ^a   Rozwadowski, M ^a   Bukaluk, A ^a  

^a UNIVERSITY OF TECHNOLOGY AND LIFE SCIENCES   (Poland)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

AES depth profiles; Dielectric function; InAg compounds; Interdiffusion; Spectroscopic ellipsometry

Indexed keywords

DIFFUSION; ELLIPSOMETRY; EVAPORATION; POLYCRYSTALLINE MATERIALS; SPECTROSCOPIC ANALYSIS; THERMAL EFFECTS; THIN FILMS; VACUUM;

AUGER DEPTH PROFILES; DIELECTRIC FUNCTIONS; INAG COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY;

SURFACE REACTIONS;

EID: 2342530477     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.115     Document Type: Conference Paper

References (12)

1. So W.W., Choe S., Chuang R., Lee C.C. Thin Solid Films. 376:2000;164.
2. Simic V., Marinkovic Z. J Less Common Met. 72:1980;133.
3. Roy R., Sen S.K., Sen S. J Mater Res. 7:1992;1377.
4. Simic V., Marinkovic Z. Thin Solid Films. 209:1992;181.
5. Simic V., Marinkovic Z. Thin Solid Films. 61:1979;149.
6. Roy R., Sen S.K. Thin Solid Films. 197:1991;303.
7. Lin J-.C., Hung L-.W., Jang G-.Y., Lee S.H. Thin Solid Films. 410:2002;212.
8. Palik ED. Handbook of optical constants of solids II. Boston: Academic Press, 1991. pp. 261-68.
9. Palmberg P.W. Anal Chem. 45:1973;549.
10. Seah MP. In: Briggs D, Seah MP, editors. Practical surface analysis. Vol. 1, 2nd ed., Chichester: John Wiley, 1990, p. 143.
11. Ho P.S., Lewis J.E., Howard J.K. J Vac Sci Technol. 14:1977;322.
12. Theye M-.L., Devant G. Thin Solid Films. 41:1969;205.