A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Shen, M ^a   Yamahata, C ^a,b   Gijs, M A M ^a  

^a EPFL   (Switzerland)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; MICROFABRICATION; POLYDIMETHYLSILOXANE; POLYMETHYL METHACRYLATES;

CENTIMETER SIZE; ELECTROMAGNETIC ACTUATORS; PMMA BALL-VALVE MICROPUMP;

ACTUATORS;

EID: 42549153201     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025031     Document Type: Article

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