Glass valveless micropump using electromagnetic actuation

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 132-137

  Yamahata, Christophe ^a   Lacharme, Frédéric ^a   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

Author keywords

Diffuser; Electromagnetic actuation; Glass bonding; Micropump; Powder blasting

Indexed keywords

BLASTING; DIFFUSERS (FLUID); GLASS BONDING; MICROSTRUCTURE; NOZZLES; PERMANENT MAGNETS; POLYMETHYL METHACRYLATES; RECIPROCATING PUMPS; RESONANCE; SUBSTRATES; VALVES (MECHANICAL);

ELECTROMAGNETIC ACTUATION; MICROEROSION; MICROPUMPS; POWDER BLASTING;

MICROELECTRONICS;

EID: 14944342728     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.018     Document Type: Conference Paper

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