Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle

Microfluidics and Nanofluidics

Volumn 2, Issue 2, 2006, Pages 89-96

  Messner, Stephan ^a   Schaible, J ^b   Sandmaier, H ^d   Zengerle, R ^a,c  

^a Institute for Micromachining and Information Technology   (Germany)

^b Hoerbiger Origa Systems GmbH   (Germany)

^c UNIVERSITY OF FREIBURG   (Germany)

^d UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Electrostatic actuation; Microvalve; Pneumatics; Silicon micromachining

Indexed keywords

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MICROMACHINING; PNEUMATICS; SILICON WAFERS; SUBSTRATES; VALVES (MECHANICAL);

CERAMICS SUBSTRATE; ELECTROSTATIC ACTUATION; PLASTIC CAP; SILICON MICROMACHINING; SILICON MICROVALVE;

FLUIDICS;

EID: 33644946820     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-005-0048-5     Document Type: Article

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