Laser-based fabrication of polymer micropump

Journal of Microlithography, Microfabrication and Microsystems

Volumn 3, Issue 1, 2004, Pages 152-158

  Kim, Joohan ^a   Xu, Xianfan ^a  

^a Purdue University   (United States)

Author keywords

Diffuser; Laser machining; Microelectromechanical systems; Micropump; Polymer

Indexed keywords

LASER MACHINING; MICROELECTROMECHANICAL SYSTEMS; MICROPUMP;

DEFECTS; DIFFUSERS (FLUID); FABRICATION; FLOW OF FLUIDS; LASER BEAM EFFECTS; LASERS; LITHOGRAPHY; MACHINE DESIGN; MICROMACHINING; POLYMERS; REYNOLDS NUMBER; SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 2542464979     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1631923     Document Type: Article

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