Electrical analogies applied on a volumetric micropump "highlighting of its fluidic resonant frequency"

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4593, Issue , 2001, Pages 292-298

  Français, Olivier ^a   Bendib, Samir ^a  

^a ESIEE PARIS   (France)

Author keywords

Electric Analogy; Electrostatic Micropump; Modelling; Resonant frequency

Indexed keywords

ELECTROSTATICS; ETCHING; FLUIDICS; NATURAL FREQUENCIES; PUMPS; SILICON WAFERS;

MICROPUMPS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035770372     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448860     Document Type: Conference Paper

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