Large-area, high-aspect-ratio SU-8 molds for the fabrication of PDMS microfluidic devices

Journal of Micromechanics and Microengineering

Volumn 18, Issue 4, 2008, Pages

  Natarajan, S ^a,b   Chang Yen, D A ^a,b   Gale, B K ^a,b  

^a University of Utah   (United States)

^b UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BIOMOLECULES; MICROFABRICATION; POLYDIMETHYLSILOXANE;

ELASTOMERIC CHANNELS; LOW COST FABRICATION; SU-8 STRUCTURES;

MICROFLUIDICS;

EID: 42549129420     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/4/045021     Document Type: Article

References (53)

1. Effenhauser C S, Bruin G J M, Paulus A and Ehrat M 1997 Anal. Chem. 69 3451
2. Hadd A G, Raymond D E, Halliwell J W, Jacobson S C and Ramsey J M 1997 Anal. Chem. 69 3407
3. Ismagilov R, Ng J M K, Kenis P J A and Whitesides G M 2001 Anal. Chem. 73 5207
4. Harrison D J, Fluri K, Seiler K, Fan Z, Effenhauser C S and Manz A 1993 Science 261 89
5. Eteshola E and Leckband D 2001 Sensors Actuators B 72 129
6. Manz A and Becker H 1998 Microsystem Technology in Chemistry and Life Sciences (Berlin: Springer)
7. Santini J T Jr, Cima M J and Langer R 1999 Nature 397 335
8. Woolley A T and Mathies R A 1995 Anal. Chem. 67 3676
9. Bruin G J M 2000 Electrophoresis 21 3931-51
10. Yakovleva J, Davidsson R, Lobanova A, Bengsston M, Eremin S, Laurell T and Emneus J 2002 Anal. Chem. 74 2994
11. Yakovleva J, Davidsson R, Bengsston M, Laurell T and Emneus J 2003 Biosens. Bioelectron. 19 21
12. Kanda V, Kariuki J K, Harrison J D and McDermott M T 2004 Anal. Chem. 76 7257
13. Chang-Yen D A, Myszka D G and Gale B K 2006 J. Microelectromech. Syst. 15 1145
14. McDonald J C, Duffy D C, Anderson J R, Chiu D T, Wu H, Schueller O J A and Whitesides G M 2000 Electrophoresis 21 27
15. Papra A, Bernard A, Juncker D, Larsen N B, Michael B and Delamarche E 2001 Langmuir 17 4090
16. Walker S L, Bhattacharjee S, Hoek E M V and Elimelech M 2002 Langmuir 18 2193
17. Beebe D J, Moore J S, Yu Q, Liu R H, Kraft M L, Jo B-H and Devadoss C 2000 Proc. Natl. Acad. Sci. 97 488
18. Hofmann O, Voirin G, Niedermann P and Manz A 2002 Anal. Chem. 74 5243
19. Vijayendran R A, Motsegood K M, Beebe D J and Leckband D E 2003 Langmuir 19 1824
20. Auroux P A, Iossifidis D, Reyes D R and Manz A 2002 Anal. Chem. 74 2637
21. Chen H, Acharya D, Gajraj A and Meiners J-C 2003 Anal. Chem. 75 5287-91
22. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Anal. Chem. 70 4974
23. Jo B-H, Van Lerberghe L M, Motsegood K M and Beebe D J 2000 J. Microelectromech. Syst. 9 76
24. Hung P J, Lee P J, Sabounchi P, Aghdam N, Lin R and Lee L P 2005 Lab Chip 5 44
25. Eddings M A and Gale B K 2006 J. Micromech. Microeng. 16 2396
26. Madou M 1997 Fundamentals of Microfabrication (New York: CRC Press)
27. Maluf N 2000 An Introduction to Microelectromechanical Systems Engineering (Boston: Artech)
28. Soper S A, Ford S M, Qi S, McCarley R L, Kelly K and Murphy M C 2000 Anal. Chem. 72 642
29. Martynova L, Locascio L E, Gaitan M, Kramer G W, Christensen R G and MacCrehan W A 1997 Anal. Chem. 69 4783
30. Russo P A, Apoga D, Dowell N, Shain W, Turner A M P, Craighead H G, Hoch H C and Turner J N 2002 Biomed. Microdevices 4 277
31. Martynova L, Locascio L E, Gaitan M, Kramer G W, Christensen R G and MacCrehan W A 1997 Anal. Chem. 69 4783
32. McCormick R M, Nelson R J, Alonso-Amigo M G, Benvegnu D J and Hooper H H 1997 Anal. Chem. 69 2626
33. Lorenz H, Despont M, Fahrni N, Brugger J, Vettiger P and Renaud P 1998 Sensors Actuators A 64 33
34. LaBianca N C and Gelorme J D 1995 Proc. SPIE 2438 846
35. Zhang J, Chan-Park M B and Conner S R 2004 Lab Chip 4 646
36. Duffy D C, McDonald J C, Schueller J A and Whitesides G M 1998 Anal. Chem. 70 4974
37. Qin D, Xia Y and Whitesides G M 1996 Adv. Mater. 8 917
38. Anderson J R, Chiu D T, Jackman R J, Cherniavskaya O, McDonald J C, Wu H, Whitesides S H and Whitesides G M 2000 Anal. Chem. 72 3158
39. Lorenz H, Despont M, Fahrniy N, LaBianca N and Renaudy P 1997 J. Micromech. Microeng. 7 121
40. Delamarche E, Schmid H, Michel B and Biebuyck H 1997 Adv. Mater. 9 741
41. Biebuyck H A, Larsen N B, Delamarche E and Michel B 1997 IBM J. Res. Dev. 41 159
42. Kim K, Park S, Lee J-B, Manohara H, Desta Y, Murphy M and Ahn C H 2002 Microsyst. Technol. 9 5
43. Chuang Y-J, Tseng F-G and Lin W-K 2002 Microsyst. Technol. 8 308
44. Daniel J H et al 2001 J. Vac. Sci. Technol. A 19 1219
45. Vulto P, Glade N, Altomare L, Bablet J, Tin L D, Medoro G, Chartier I, Manaresi N, Tartagni M and Guerrieri R 2005 Lab Chip 5 158
46. Tay H K, Lee D, Xu1 G and Yang C 2006 J. Phys.: Conf. Ser. 34 1112
47. Christensen A M, Chang-Yen D A and Gale B K 2005 J. Micromech. Microeng. 15 928
48. Natarajan S, Hatch A C, Myszka D G and Gale B K 2008 Anal. Chem. submitted
49. McDonnel J M 2001 Curr. Opin. Chem. Biol. 5 572
50. Brockman J R and Fernandez S 2001 Am. Lab. 6 37
51. Young R A 2000 Cell 102 9
52. Epstein C B and Butow R A 2000 Curr. Opin. Biotechnol. 11 36
53. Svitel J, Balbao A, Mariuzza R A, Gonzales N R and Schuck P 2003 Biophys. J. 84 4062