Development of novel segmented-plate linearly tunable MEMS capacitors

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Shavezipur, M ^a   Khajepour, A ^a   Hashemi, S M ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; MATHEMATICAL MODELS; OPTIMIZATION; TUNING;

LINEAR RESPONSES; MEMS CAPACITORS; SEGMENTATION TECHNIQUE;

MEMS;

EID: 42549086684     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035035     Document Type: Article

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