RF magnetron sputtered La3+-modified PZT thin films: Perovskite phase stabilization and properties

Materials Chemistry and Physics

Volumn 110, Issue 1, 2008, Pages 120-127

  Singh, Ravindra ^a   Goel, T C ^b   Chandra, Sudhir ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^b BIRLA INSTITUTE OF TECHNOLOGY AND SCIENCE   (India)

Author keywords

Dielectric properties; PLZT thin films; Pure perovskite phase; RF magnetron sputtering

Indexed keywords

DIELECTRIC PROPERTIES; LANTHANUM COMPOUNDS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; RAPID THERMAL ANNEALING;

PLZT THIN FILMS; PURE PEROVSKITE PHASES; RF MAGNETRON SPUTTERING;

THIN FILMS;

EID: 41949132446     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2008.01.038     Document Type: Article

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