Sol-gel derived la modified PZT thin films: Structure and properties

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 11, Issue 2, 2004, Pages 264-270

  Singh, Ravindra ^a   Chandra, Sudhir ^a   Sharma, Seema ^a   Tripathi, A K ^a   Goel, T C ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Coercive field; Dielectric constant; Ferroelectric thin films; MEMS; Micromachining; PLZT; Polarization; Remnant polarization; Sol gel

Indexed keywords

DIAPHRAGMS; ELECTRON ABSORPTION; INFRARED DETECTORS; LANTHANUM; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; PERMITTIVITY; PEROVSKITE; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SILICON; SOL-GELS; SPIN COATING; X RAY DIFFRACTION;

COERCIVE FIELD; INFRARED SENSORS; PLZT; REMMANT POLARIZATION;

FERROELECTRIC THIN FILMS;

EID: 2342527335     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDEI.2004.1285896     Document Type: Conference Paper

References (29)

1. D. Damjanovic, "Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics", Rep. Prog. Phys., Vol. 61, pp. 1267-1324, 1998.
2. R. Ramesh, S. Aggarwal, O. Auciello, "Science and technology of ferroelectric films and hetrostructures for non-volatile ferroelectric memories", Materials Sei. Eng., Vol. 32, pp. 191-236, 2001.
3. N. M. Shorrocks, A. Patel, M. J. Walker and A. D. Parsons, "Integrated thin film PZT pyroelectric detector arrays", Microelectronic Eng., Vol. 29, pp. 59-66, 1995.
4. D. L. Polla and W. P. Robbins, Ferroelectric devices for MEMS applications, Wiley Interscience, Vol. 4, 2000.
5. T. Kanda, T. Morita, M. K. Kurosawa and T. Higuchi, "A flat type touch probe sensor using PZT thin film vibrator", Sensors and Actuators A, Vol. 83, Issues 1-3, pp. 67-75, 2000.
6. E. Cattan, T. Haccart, G. Valu, D. Remiens, C. Bergaud and L. Nicu, "Piezoelectric properties of PZT films for microcantilever", Sensors and Actuators A, Vol. 74, Issues 1-3, pp. 60-64, 1999.
7. M. Okuyama, I. Usuki, Y. Hamakawa and T. Nakagawa, "Epitaxial growth of ferroelectric PLZT thin film and their optical properties", Appl. Phys., Vol. 21, pp. 339-343, 1980.
8. B. Panda, S. K. Ray, A. Dhar, A. Sarkar, D. Bhattacharya and K. L. Chopra, "Electron beam deposited lead-lanthanum-zirconate-titanate thin films for silicon based device applications", J. Appl. Phys., Vol. 79, pp. 1008-1012, 1996.
9. J. Lappalainen, J. Frantti, H. Moilanen, S. Leppavuori, "Excimer laser ablation of PZT thin films on silicon cantilever beams", Sensors and Actuators A, Vol. 46-47, pp. 104-109, 1995.
10. M. Sayer, G. Yi and M. Sedlar, "Comparative sol-gel processing of PZT thin films", Integ. Ferroelectrics. Vol. 7, pp. 247-258, 1995.
11. S. Ansermet, D. Otter, R.W. Craddock and J. L. Dancaster, "Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications", Sensors and Actuators A, Vol. 21, Issues 1-3, pp. 79-83, 1990.
12. J. M. Huang, K. M. Liew, C. H. Wong, S. Rajendran, M. J. Tan and A. Q. Liu, "Mechanical design and optimization of capacitive micromachined switch", Sensors and Actuators A: Physical, Vol. 93, Issue 3, pp. 273-285, 2001.
13. C. Vijayaraghavan, T. C. Goel and R. G. Mendiratta, "Structural and electrical properties of sol-gel synthesized PLZT thin films", IEEE Trans. Dielectr. Electr. Insul., Vol. 6, pp. 69-72. 1999.
14. S. L. Swartz, S. J. Bright, P. J. Melling and T. R. Shrout, "Sol-gel processing of composite PT/PLZT thin films", Ferroelectrics, Vol. 108, pp. 71-76, 1990.
15. 3 thin films: Effects of PbTiO3 interlayer", Japan J. Appl. Phys., Vol. 35, pp. 3954-3959, 1996.
16. K. E. Bean, "Anisotropic etching of silicon", IEEE Trans. Electron devices, Vol. 25, pp. 1185-1193, 1978.
17. M. E. Lines and A. M. Glass, Principles and Applications of Ferroelectrics and Related Materials, Clarendon Press, Oxford, 1st ed. 1977.
18. V. M. Isshchuk and E. M. Morozov, "Phase transition in lanthanum-doped lead zirconate-titanate", Sov. Phys. Solid State, Vol. 21, pp. 1113-1116, 1979.
19. G. H. Haertling, "Ferroelectric ceramics: History and technology", J. Am. Ceram. Soc., Vol. 82, pp.797-818, 1999.
20. 3 ferroelectric ceramics for electrooptic applications", J. Am. Cer. Soc., Vol. 54, pp. 1-10, 1971.
21. S. H. Lee, H. J. Joo, J. P. Kim, J. H. Jung, M. K. Ryu, S. S. Lee and M. S. Jan, "Thickness dependence of the electrical properties for PZT films", J. Korean Phys. Soc., Vol. 35, pp. S1172-S1175, 1999.
22. 3 thin film capacitors", Mat. Res. Bull., Vol. 35, pp. 1113-1122, 2000.
23. A. K. Garg, A. K. Tripathi, T. C. Goel, Michael M. A. Sekar and C. N. Sukenik, "Preparation and characterization of lead lanthanum zirconate titanate (PLZT) thin films using an organic self-assembled monolayer tempelate", Materials Sci. Eng. B, Vol. 87, pp. 87-91, 2001.
24. 3 thin films deposited by metllo-organic deposition technology", J. Appl. Phys., Vol. 79, pp. 4283-4290, 1996.
25. G. Arlt, D. Hennings and G. de With, "Dielectric properties of fine-grained barium titanate ceramics", J. Appl. Phys., Vol. 58, pp. 1619-1625, 1985.
26. 3 thin films", Materials Sci. Eng. B, Vol. 25, pp. 34, 1994.
27. C. Sudhama, A. C. Campbell, P. D. Maniar, R. E. Jones, R. Moazzami and C.J. Mogabb, "A modal for electrical conduction in metal-ferroelectrical- metal thin-film capacitors", J. Appl. Phys., Vol. 75, pp. 1014-1022, 1994.
28. 3 metallic oxide electrodes", J. Appl. Phys., Vol. 82, pp. 1293-1298, 1997.
29. J. P. D. Hartog, Mechanical Vibrations, McGraw Hill, New York, 4th ed. 1956.