RF sputtered PLZT thin film on Pt/Ti electrode

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 44, Issue 3, 1997, Pages 675-680

  Lu, D X ^a   Pun, Edwin Y B ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COERCIVE FORCE; CRYSTAL STRUCTURE; CRYSTALLIZATION; MAGNETRON SPUTTERING; PEROVSKITE; PLATINUM; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SUBSTRATES; THIN FILMS; TITANIUM;

LANTHANUM MODIFIED LEAD ZIRCONATE TITANATES; PLATINUM ELECTRODES; TITANIUM ELECTRODES;

DIELECTRIC FILMS;

EID: 0031142966     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.658328     Document Type: Article

References (21)

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