Achieving precision in high density batch mode micro-electro-discharge machining

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Richardson, Mark T ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DEBRIS; HYDRODYNAMICS; PARAMETER ESTIMATION; PASSIVATION; STAINLESS STEEL; WEAR RESISTANCE;

HIGH DENSITY BATCH MODE; PARALLEL LINES; SQUARE ARRAY; WEAR RATE;

ELECTRIC DISCHARGE MACHINING;

EID: 41849145325     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015002     Document Type: Article

References (40)

1. Masaki T, Kawata K and Masuzawa T 1990 Micro electro-discharge machining and its applications Proc. of IEEE MEMS 1990 pp 21-6
2. Ho K H and Newman S T 2003 State of the art electrical discharge machining (EDM) Int. J. Mach. Tools Manuf. 43 1287-300
3. Ehrfeld W, Lehr H, Michel F and Wolf A 1996 Microelectro discharge machining as a technology in micromachining SPIE's Symp. Micromachining and Microfabrication vol 2879 pp 332-7
4. Koch O, Ehrfeld W and Michel F 2000 Micro-electro discharge machining-application, strategy and technology Proc. 2nd Int. Workshop Microfactories (IWMF) pp 79-82
5. Takahata K and Gianchandani Y B 2002 Batch mode micro-electro-discharge machining J. MEMS 11 102-10
6. Takahata K, DeHennis A, Wise K D and Gianchandani Y B 2003 Stentenna: a micromachined antenna stent for wireless monitoring of implantable microsensors IEEE Conf. EMBS pp 3360-3
7. Stampfl J, Leitgeb R, Cheng Y-L and Prinz F B 2000 Electro-discharge machining of mesoscopic parts with electroplated copper and hot-pressed silver tungsten electrodes J. Micromech. Microeng 10 1-6
8. Amorim F L and Weingaertner W L 2004 Die-sinking electrical discharge machining, of a high-strength copper-based alloy for injection molds J. Braz. Soc. Mech. Sci. Eng 26 137-44
9. Udeshi K, Richardson M, Hung J-J, Que L, Rebeiz G M and Gianchandani Y B 2005 A dual-EDM reverse damascene process for RF switches and other bulk devices Proc. of IMECE, MEMS Div. pp 137-41
10. Takahata K 2005 Batch manufacturing technology based on micro-electro-discharge machining and application to cardiovascular stents PhD Thesis University of Michigan
11. McGeough J A 1998 Advanced Methods of Machining (New York: Chapman and Hall) pp 128-52
12. Brown J 1998 Advanced Machining Technology Handbook (New York: McGraw Hill)
13. El-Hofy H 2005 Advanced Machining Processes: Nontraditional and Hybrid Machining Processes (New York: McGraw Hill)
14. Chapman W 2002 Modern Machine Shop's Handbook for the Metalworking Industries (Cincinatti, OH: Hanser Gardner)
15. Schumacher B M 2004 After 60 years of EDM the discharge process remains still disputed J. Mater. Process. Technol. 149 376-81
16. Lewis T J 2003 Breakdown initiating mechanisms at electrode interfaces in liquids IEEE Trans. Dielectr. Electr. Insul. 10 948-54
17. Schulze H P, Lauter M, Wollenberg G, Storr M and Rehbein W 2001 Investigation of the pre-ignition stage in EDM Proc. 13th Int. Symp. on Electromachining (May 2001) pp 141-52
18. Descoeudres A 2006 Characterization of electrical discharge machining plasmas PhD Thesis EPFL
19. Albinksi K, Musiol K, Miernikiewicz A, Labuz S and Malota M 1996 The temperature of a plasma used in electrical discharge machining Plasma Sources Sci. Tech 5 736-42
20. Pompili M, Mazzetti C and Forster E O 1992 Partial discharge distributions in liquid dielectrics IEEE Trans. Electr. Insul. 27 99-105
21. Murphy E J 1970 The generation of gases in the dielectric breakdown of oil J. Phys. D: Appl. Phys. 3 917-23
22. Kaneko T and Tsuchiya M 1997 Observation of behavior of machining products in die-sinking EDM by using high-speed VTR Int. J. Electr. Mach. 2 37-42
23. Richardson M T and Gianchandani Y B 2005 A passivated electrode batch νEDM technology for bulk metal transducers and packages Proc. IEEE Sensors 219-22
24. Richardson M T, Gianchandani Y B and Skala D S 2006 A parametric study of dimensional tolerance and hydrodynamic debris removal in micro-electro- discharge machining Proc. IEEE MEMS pp 314-7
25. L Kao Y, Tu G C, Huang C A and Chang J H 2004 The annealing behaviour of copper deposit electroplated in sulfuric acid bath with various concentrations of thiourea Mater. Sci. Eng. A 382 104-11
26. Yu Z Y, Rajurkar K P and Shen H 2002 High aspect ratio and complex shaped blind micro holes by micro EDM Ann. CIRP 50 359-62
27. Zhao Y, Zhang X, Liu X and Yamazaki K 2004 Geometric modeling of the linear motor driven electrical discharge machine (EDM) die-sinking process Int. J. Mach. Tools Manuf. 44 1-9
28. Kaneko Y, Yamada H, Toyonaga T and Shoda K 2000 Performance of linear motor equipped die-sinking EDM Int. J. Mach. Tools Manuf. 5 59-64
29. Lim H S, Wong Y S, Rahman M and Edwin Lee M K 2003 A study on the machining of high-aspect ratio micro-structures using micro-EDM J. Mater. Process. Technol 140 318-25
30. Yeo S H and Tan L K 1999 Effects of ultrasonic vibrations in micro-electro-discharge machining of microholes J. Micromech. Microeng. 9 345-52
31. Zhang Q H, Zhang J H, Ren S F, Deng J X and Ai X 2004 Study on technology of ultrasonic vibration aided electrical discharge machining in gas J. Mater. Process. Technol 149 640-4
32. Gao C and Liu Z 2003 A study of ultrasonically aided micro-electrical- discharge machining by the application of workpiece vibration J. Mater. Process. Technol. 139 226-8
33. Yeo S H and Tan L K 1999 Effects of ultrasonic vibrations in micro electro-discharge machining of microholes J. Micromech. Microeng. 9 345-52
34. Kumagai S, Misawa N, Takeda K and Abdukarimov E T 2003 Plasma-applied machining of a narrow and deep hole in a metal using a dielectric-encased wire electrode Thin Solid Films 457 180-5
35. Aoyama S, Tamura K, Sato T, Kimura T, Sawahata K and Nagai T 1999 High-performance coated wire electrodes for high-speed cutting and accurate machining Hitachi Cable Rev. 18 75-80
36. Masuzawa T, Fujino M, Kobayashi K and Suzuki T 1985 Wire electro-discharge grinding for micromachining CIRP Ann. 34 431-4
37. Morf W E, Guenat O T and de Rooij N F 2001 Electroosmotic pumping in complex capillary systems: 1. Principles and general theoretical approach Sensors Actuators B 72 266-72
38. Tobazeon R 1996 Electrohydrodynamic behaviour of single spherical or cylindrical conducting particles in an insulating liquid subjected to a uniform DC field J. Phys. D: Appl. Phys 29 2595-608
39. Soni J S 1994 Microanalysis of debris formed during rotary EDM of titanium alloy (Ti 6Al 4V) and die steel (T 215 Cr12) Wear J. 177 71-9
40. Bokhonov B and Korchagin M 2002 In-situ investigation of the formation of eutectic alloys in the systems silicon-silver and silicon-copper J. Alloys Compd. 335 149-56