A parametric study of dimensional tolerance and hydrodynamic debris removal in micro-electro-discharge machining

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 314-317

  Richardson, Mark T ^a,c   Gianchandani, Yogesh B ^a   Skala, Dawn S ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGE MACHINING; HYDRODYNAMICS; LITHOGRAPHY; MACHINE TOOLS; STAINLESS STEEL;

DEBRIS ACCUMULATION; HYDRODYNAMIC DEBRIS; MACHINING TOLERANCE;

DEBRIS;

EID: 33745155529     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. K. Takahata, A. DeHennis, K.D. Wise, Y.B. Gianchandani, "Stentenna: A Micromachined Antenna Stent for Wireless Monitoring of Implantable Microsensors," IEEE Conf. EMBS, 2003, pp. 3360-3.
2. K. Udeshi, M. Richardson, J.-J. Hung, L. Que, G.M. Rebeiz, Y.B. Gianchandani, "A dual-EDM reverse damascene process for RF switches and other bulk devices," ASME IMECE, Nov. 2005, in press.
3. T. Masaki, K. Kawata, and T. Masuzawa, "Micro Electro-Discharge Machining and Its Applications," IEEE MEMS '90, pp. 21-26, 1990.
4. K. Takahata and Y.B. Gianchandani, "Batch Mode Micro-Electro- Discharge Machining," IEEE J.MEMS 11(2), pp. 102-110, 2002.
5. J. McGeough, Advanced Methods of Machining. London; New York: Chapman and Hall, pp. 129-151, 1988.
6. M.T. Richardson and Y.B. Gianchandani, "A Passivated Electrode Batch μEDM Technology for Bulk Metal Transducers and Packages," IEEE Sensors, November 2005, to be published.
7. S.H. Yeo and L.K. Tan, "Effects of ultrasonic vibrations m micro-electro-discharge machining of microholes," IOP J. Micromech. Microeng., Vol 9, pp. 345-352, 1999.