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Volumn 103, Issue 5, 2008, Pages

Visible photoluminescence from plasma-synthesized Si O2 -buffered Si Nx films: Effect of film thickness and annealing temperature

(7) Xu, M a,b,c Xu, S c,d Chai, J W c,d Long, J D c,d Cheng, Q J c,d Ee, Y C e Ostrikov, K d,f,g

a SICHUAN NORMAL UNIVERSITY (China)

b INTERNATIONAL CENTRE FOR MATERIALS PHYSICS (China)

c NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

d NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

e CHARTERED SEMICONDUCTOR MANUFACTURING LTD (Singapore)

f UNIVERSITY OF SYDNEY (Australia)

g CSIRO (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; PLASMAS; SILICON COMPOUNDS; SYNTHESIS (CHEMICAL);

ANNEALING TEMPERATURES; PLASMA-ASSISTED RADIO FREQUENCY MAGNETRON SPUTTERING;

THIN FILMS;

EID: 40849088182 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2884531 Document Type: Article

Times cited : (9)

References (29)

1
- 0028763293
- APPLAB 0003-6951 10.1063/1.112852.
- T. S. Iwayama, S. Nakao, and K. Saitoh, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.112852 65, 1814 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1814
- Iwayama, T.S.¹ Nakao, S.² Saitoh, K.³

2
- 0029959624
- NATUAS 0028-0836 10.1038/384338a0.
- K. D. Hirschman, L. Tsybeskov, S. P. Duttagupta, and P. M. Fauchet, Nature (London) NATUAS 0028-0836 10.1038/384338a0 384, 338 (1996).
- (1996) Nature (London) , vol.384 , pp. 338
- Hirschman, K.D.¹ Tsybeskov, L.² Duttagupta, S.P.³ Fauchet, P.M.⁴

3
- 0034707054
- NATUAS 0028-0836 10.1038/35044012.
- L. Pavesi, L. D. Negro, C. Mazzoleni, G. Franzo, and J. P. Prolo, Nature (London) NATUAS 0028-0836 10.1038/35044012 408, 440 (2000).
- (2000) Nature (London) , vol.408 , pp. 440
- Pavesi, L.¹ Negro, L.D.² Mazzoleni, C.³ Franzo, G.⁴ Prolo, J.P.⁵

4
- 21544432504
- JAPIAU 0021-8979 10.1063/1.357031.
- T. Shimizu-Iwayama, K. Fujita, S. Nakao, K. Saitoh, T. Fujita, and N. Itoh, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.357031 75, 7779 (1994).
- (1994) J. Appl. Phys. , vol.75 , pp. 7779
- Shimizu-Iwayama, T.¹ Fujita, K.² Nakao, S.³ Saitoh, K.⁴ Fujita, T.⁵ Itoh, N.⁶

5
- 0041830303
- PHYBE3 0921-4526.
- V. Ligatchev, Physica B PHYBE3 0921-4526 337, 346 (2003).
- (2003) Physica B , vol.337 , pp. 346
- Ligatchev, V.¹

6
- 0001129964
- PRBMDO 0163-1829 10.1103/PhysRevB.55.6988.
- H. Z. Song and X. M. Bao, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.55.6988 55, 6988 (1997).
- (1997) Phys. Rev. B , vol.55 , pp. 6988
- Song, H.Z.¹ Bao, X.M.²

7
- 34547372438
- JPAPBE 0022-3727 10.1088/0022-3727/40/12/005.
- X. Wen, L. V. Dao, and P. Hannaford, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/40/12/005 40, 3573 (2007).
- (2007) J. Phys. D , vol.40 , pp. 3573
- Wen, X.¹ Dao, L.V.² Hannaford, P.³

8
- 26244451229
- RMPHAT 0034-6861 10.1103/RevModPhys.77.489.
- K. Ostrikov, Rev. Mod. Phys. RMPHAT 0034-6861 10.1103/RevModPhys.77.489 77, 489 (2005).
- (2005) Rev. Mod. Phys. , vol.77 , pp. 489
- Ostrikov, K.¹

9
- 0029515673
- APPLAB 0003-6951 10.1063/1.115352.
- B. H. Augustine, Y. Z. Hu, E. A. Irene, and L. E. Mcneil, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.115352 67, 3694 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3694
- Augustine, B.H.¹ Hu, Y.Z.² Irene, E.A.³ McNeil, L.E.⁴

10
- 4644229282
- JCOMEL 0953-8984 10.1088/0953-8984/16/36/012.
- S. Leitch, A. Moewes, L. Ouyang, W. Y. Ching, and T. Sekine, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/16/36/012 16, 6469 (2004).
- (2004) J. Phys.: Condens. Matter , vol.16 , pp. 6469
- Leitch, S.¹ Moewes, A.² Ouyang, L.³ Ching, W.Y.⁴ Sekine, T.⁵

11
- 0031557562
- JPAPBE 0022-3727 10.1088/0022-3727/30/7/002.
- G. Dupont, H. Caquineau, B. Despax, R. Berjoan, and A. Dollet, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/30/7/002 30, 1064 (1997).
- (1997) J. Phys. D , vol.30 , pp. 1064
- Dupont, G.¹ Caquineau, H.² Despax, B.³ Berjoan, R.⁴ Dollet, A.⁵

12
- 0030127783
- SSCOA4 0038-1098 10.1016/0038-1098(96)00064-6.
- A. Aydinli, A. Serpenguezel, and D. Vardar, Solid State Commun. SSCOA4 0038-1098 10.1016/0038-1098(96)00064-6 98, 273 (1996).
- (1996) Solid State Commun. , vol.98 , pp. 273
- Aydinli, A.¹ Serpenguezel, A.² Vardar, D.³

13
- 0000888201
- APPLAB 0003-6951 10.1063/1.119378.
- L. S. Liao, Z. H. Xiong, X. Zhou, X. B. Liu, and X. Y. Hou, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.119378 71, 2193 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2193
- Liao, L.S.¹ Xiong, Z.H.² Zhou, X.³ Liu, X.B.⁴ Hou, X.Y.⁵

14
- 40849114600
- APPLAB 0003-6951.
- T. Qiu, X. L. Wu, G. J. Wan, Y. F. Mei, G. G. Siu, and P. K. Chu, Appl. Phys. Lett. APPLAB 0003-6951 86, 19311 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 19311
- Qiu, T.¹ Wu, X.L.² Wan, G.J.³ Mei, Y.F.⁴ Siu, G.G.⁵ Chu, P.K.⁶

15
- 0013367218
- APPLAB 0003-6951 10.1063/1.1329163.
- M. Molinari, H. Rinnert, and M. Vergnat, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1329163 77, 3499 (2000).
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3499
- Molinari, M.¹ Rinnert, H.² Vergnat, M.³

16
- 79955999988
- APPLAB 0003-6951 10.1063/1.1473230.
- Z. Pei, Y. R. Chang, and H. L. Hwang, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1473230 80, 2839 (2002).
- (2002) Appl. Phys. Lett. , vol.80 , pp. 2839
- Pei, Z.¹ Chang, Y.R.² Hwang, H.L.³

17
- 33644520597
- MSBTEK 0921-5107 10.1016/j.mseb.2005.11.020.
- M. Xu, S. Xu, Y. C. Ee, C. Yong, J. W. Chai, S. Y. Huang, and J. D. Long, Mater. Sci. Eng., B MSBTEK 0921-5107 10.1016/j.mseb.2005.11.020 128, 89 (2006).
- (2006) Mater. Sci. Eng., B , vol.128 , pp. 89
- Xu, M.¹ Xu, S.² Ee, Y.C.³ Yong, C.⁴ Chai, J.W.⁵ Huang, S.Y.⁶ Long, J.D.⁷

18
- 33845939049
- APPLAB 0003-6951 10.1063/1.2408662.
- M. Xu, S. Xu, J. W. Chai, J. D. Long, and Y. C. Ee, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2408662 89, 251904 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 251904
- Xu, M.¹ Xu, S.² Chai, J.W.³ Long, J.D.⁴ Ee, Y.C.⁵

19
- 0035335474
- PHPAEN 1070-664X 10.1063/1.1343887.
- S. Xu, K. N. Ostrikov, Y. Li, E. L. Tsakadze, and I. R. Jones, Phys. Plasmas PHPAEN 1070-664X 10.1063/1.1343887 8, 2549 (2001).
- (2001) Phys. Plasmas , vol.8 , pp. 2549
- Xu, S.¹ Ostrikov, K.N.² Li, Y.³ Tsakadze, E.L.⁴ Jones, I.R.⁵

20
- 32844460931
- VACUAV 0042-207X 10.1016/j.vacuum.2005.07.010.
- S. Xu, K. Ostrikov, J. D. Long, and S. Y. Huang, Vacuum VACUAV 0042-207X 10.1016/j.vacuum.2005.07.010 80, 621 (2006).
- (2006) Vacuum , vol.80 , pp. 621
- Xu, S.¹ Ostrikov, K.² Long, J.D.³ Huang, S.Y.⁴

21
- 0347134643
- PHYBE3 0921-4526 10.1016/j.physb.2003.09.176.
- T. V. Torchynska, A. Diaz Cano, M. Morales Rodriguez, and L. Yu. Khomenkova, Physica B PHYBE3 0921-4526 10.1016/j.physb.2003.09.176 340, 1113 (2003).
- (2003) Physica B , vol.340 , pp. 1113
- Torchynska, T.V.¹ Diaz Cano, A.² Morales Rodriguez, M.³ Khomenkova, L.Yu.⁴

22
- 34047157653
- APPLAB 0003-6951 10.1063/1.2717014.
- M. H. Wang, D. S. Li, Z. Z. Yuan, D. R. Yang, and D. L. Que, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2717014 90, 131903 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 131903
- Wang, M.H.¹ Li, D.S.² Yuan, Z.Z.³ Yang, D.R.⁴ Que, D.L.⁵

23
- 30244459829
- JCOMEL 0953-8984 10.1088/0953-8984/4/40/001.
- L. C. Wang, D. Feng, Q. Li, Y. L. He, and Y. M. Chu, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/4/40/001 4, L509 (1992).
- (1992) J. Phys.: Condens. Matter , vol.4 , pp. 509
- Wang, L.C.¹ Feng, D.² Li, Q.³ He, Y.L.⁴ Chu, Y.M.⁵

24
- 20844456249
- APPLAB 0003-6951 10.1063/1.1931830.
- X. Yang, X. L. Wu, S. H. Li, H. Li, T. Qiu, Y. M. Yang, P. K. Chu, and G. G. Siu, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1931830 86, 201906 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 201906
- Yang, X.¹ Wu, X.L.² Li, S.H.³ Li, H.⁴ Qiu, T.⁵ Yang, Y.M.⁶ Chu, P.K.⁷ Siu, G.G.⁸

25
- 0037336240
- PELNFM 1386-9477.
- M. Modreanu, M. Gartner, E. Aperathitis, N. Tomozeiu, M. Androulidaki, D. Cristea, and P. Hurley, Physica E (Amsterdam) PELNFM 1386-9477 16, 461 (2003).
- (2003) Physica e (Amsterdam) , vol.16 , pp. 461
- Modreanu, M.¹ Gartner, M.² Aperathitis, E.³ Tomozeiu, N.⁴ Androulidaki, M.⁵ Cristea, D.⁶ Hurley, P.⁷

26
- 28844462386
- APPLAB 0003-6951 10.1063/1.2140888.
- V. Ligatchev, Rusli, and Z. Pan, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2140888 87, 242903 (2005).
- (2005) Appl. Phys. Lett. , vol.87 , pp. 242903
- Ligatchev, V.¹ Rusli² Pan, Z.³

27
- 33748081438
- VACUAV 0042-207X 10.1016/j.vacuum.2006.01.025.
- K. Ostrikov, J. D. Long, P. P. Rutkevych, and S. Xu, Vacuum VACUAV 0042-207X 10.1016/j.vacuum.2006.01.025 80, 1126 (2006).
- (2006) Vacuum , vol.80 , pp. 1126
- Ostrikov, K.¹ Long, J.D.² Rutkevych, P.P.³ Xu, S.⁴

28
- 34248570861
- JPAPBE 0022-3727 10.1088/0022-3727/40/8/S01.
- K. Ostrikov and A. B. Murphy, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/40/8/S01 40, 2223 (2007).
- (2007) J. Phys. D , vol.40 , pp. 2223
- Ostrikov, K.¹ Murphy, A.B.²

29
- 34248545539
- APPLAB 0003-6951 10.1063/1.2731728.
- Q. J. Cheng, S. Xu, J. D. Long, and K. Ostrikov, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2731728 90, 173112 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 173112
- Cheng, Q.J.¹ Xu, S.² Long, J.D.³ Ostrikov, K.⁴

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