Visible photoluminescence from low temperature deposited hydrogenated amorphous silicon nitride

Solid State Communications

Volumn 98, Issue 4, 1996, Pages 273-277

  Aydinli, Atilla ^a   Serpengüzel, Ali ^a   Vardar, Didem ^a  

^a BILKENT UNIVERSITY   (Turkey)

Author keywords

A. thin films; D. optical properties; E. luminescence

Indexed keywords

AMMONIA; AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PLASMA APPLICATIONS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

HYDROGENATED AMORPHOUS SILICON NITRIDE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL PROCESSOR; VALANCY;

SILICON NITRIDE;

EID: 0030127783     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/0038-1098(96)00064-6     Document Type: Article

References (19)

1. A. Bsiesy et .al. Surf. Sci. 254, 195 (1991).
2. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990).
3. Optical Properties of Low Dimensional Silicon Structures, NATO ASI Series, 44, Eds:D.C. Bensahel, L.T. Canham, and S. Ossicini, Dordrecht, Kluwer (1993).
4. M.S. Brandt, H.D. Fuchs, M. Stutzmann, J. Weber, and M. Cardona, Solid State Commun. 81, 307 (1992).
5. M.W. Cole, J.F. Harvey, R.A. Lux, D.W. Eckert and R. Tsu, Appl. Phys. Lett. 60, 2800 (1992).
6. D.J. Wolford, B.A. Scoot, J.A. Reimer and J.A. Bradley, Physica B117, 920 (1983).
7. F.N. Timofeev, A. Aydinli, R. Ellialtioǧlu, K. Türkoǧlu, M. Güre, V.N. Mikhailov, and O.A. Lavrova, Solid State Commun. 95, 443 (1995).
8. M.H. Brodsky, Solid State Commun. 36, 55 (1980).
9. V. Petrova-Koch, T. Muschik, A. Kux, B.K. Meyer and F. Koch, Appl. Phys. Lett. 61, 943 (1992).
10. X.Y. Hou, G. Shi, W. Wang, HF.L. Zhang, P.H. Hao, D. M. Huang and X. Wang, Appl. Phys. Lett. 62, 1097 (1993).
11. W.A. Lanford, and M.J. Rand, J.Appl. Phys. 49, 2473 (1978).
12. W. B. Pollard, and G. Lucovsky, Phys. Rev. B26, 3172 (1982).
13. W.-S. Liao, C.-H. Lin and S.-C. Lee, Appl. Phys. Lett. 65, 2229 (1994).
14. A. Morimoto, S. Oozara, M. Kumeda and T. Shimizu, Phys. Status Solidi B119 ,715 (1983)
15. H.J. Stein, P.S. Peercy and R.J. Sokel, Thin Solid Films 101, 291 (1983).
16. J. Robertson, Philosophical Magazine B69, 307 (1994).
17. G. Lucovsky, J. Yang, S.S. Chao, J.E. Tyler, and W. Czubatyj, Phy. Rev. B28, 3243 (1983).
18. P. Bruesch, Th. Stockmeier, F. Stucki, P.A. Buffat, and J.K.N. Linder, J. Appl. Phys. 73, 7677 (1993).
19. R. Karcher, L. Ley and R.L. Johnson, Phys. Rev. B, 30, 1896 (1984).