A highly sensitive Pb(Zr,Ti)O3 thin film ultrasonic micro-sensor with a grooved diaphragm

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 12, 2007, Pages 2439-2444

  Matsushima, Tomoaki ^a,b   Xiong, Sibei ^b   Kawada, Hiroshi ^b   Yamanaka, Hiroshi ^b   Muralt, Paul ^a,c  

^a IEEE

^b PANASONIC CORPORATION   (Japan)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LEAD; MEMS; PEROVSKITE; PIEZOELECTRIC DEVICES; SOL-GEL PROCESS; ULTRASONIC SENSORS;

GROOVE STRUCTURE; GROOVED DIAPHRAGM; PIEZOELECTRIC ULTRASONIC SENSORS;

THIN FILMS;

LEAD; LEAD TITANATE ZIRCONATE; TITANIUM; UNCLASSIFIED DRUG; ZIRCONIUM;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; ECHOGRAPHY; ELECTROCHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; IMAGE ENHANCEMENT; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; MICROELECTRODE; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; IMAGE ENHANCEMENT; LEAD; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; MICROELECTRODES; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TITANIUM; TRANSDUCERS; ULTRASONOGRAPHY; ZIRCONIUM;

EID: 40649101182     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.557     Document Type: Conference Paper

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