Sensitivity of ultrasonic sensor structures having multilayer diaphragm structure

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 12 A, 2004, Pages

  Lee, Seungmock ^a   Tanaka, Tsunehisa ^a   Inoue, Koji ^a   Yamasita, Kaoru ^a   Okuyama, Masanori ^b  

^a OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Composite membrane; MEMS; Resonant frequency; Sensitivity; Stress; Ultrasonic sensor

Indexed keywords

ANNEALING; DEPOSITION; ELASTICITY; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MULTILAYERS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SENSITIVITY ANALYSIS; SILICON; SPUTTERING; THIN FILMS; ULTRASONIC TRANSDUCERS; X RAY DIFFRACTION ANALYSIS;

COMPOSITE MEMBRANES; LEAD-ZIRCONATE-TITANATE (PZT); SILICON-ON -INSULATOR (SOI); TENSILE FORCES; ULTRASONIC SENSORS;

MICROSENSORS;

EID: 12844264687     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.L1534     Document Type: Article

References (9)

1. Y. Mo, T. Tanaka, K. Inoue, K. Yamashita and Y. Suzuki: J. MEMS 12 (2003) 506.
2. M. Okuyama: T. IEE Jpn. 121-E (2001) 537 [in Japanese].
3. S. S. Sengupta, S. M. Park, D. A. Payne and L. H. Allen: J. Appl. Phys. 83 (1998) 2291.
4. S. Timosenko and S. Woinowsky-Krieger: Theory of Plates and Shells (McGraw-Hill, New York, 1959) 2nd ed.
5. D. Young: J. Appl. Mechanics 17 (1950) 448.
6. S. M. Lee, T. Tanaka, K. Inoue, J.-M. Kim, Y. E. Shin and M. Okuyama: to be published in Sensors & Actuators A.
7. H. D. Chen, K. Udayakumar, C. J. Gaskey, L. E. Cross, J. J. Bernstein and L. C. Niles: J. Am. Ceram. Soc. 79 (1996) 2189.
8. P. Hess: Appl. Surf. Sci. 106 (1996) 429.
9. M. T. Kim: Thin Solid Films 283 (1996) 12.