Study of single deeply corrugated diaphragms for high-sensitivity microphones

Journal of Micromechanics and Microengineering

Volumn 13, Issue 2, 2003, Pages 184-189

  Wang, W J ^a   Lin, R M ^a   Li, X ^b   Guo, D G ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS; FINITE ELEMENT METHOD; SENSITIVITY ANALYSIS;

HIGH-SENSITIVITY DEVICES;

MICROPHONES;

EID: 0037340696     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/2/304     Document Type: Article

References (9)

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