Micromachined accelerometers with optical interferometric read-out and integrated electrostatic actuation

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 37-44

  Hall, Neal A ^a   Okandan, Murat ^a   Littrell, Robert ^a   Serkland, Darwin K ^a   Keeler, Gordon A ^a   Peterson, Ken ^a   Bicen, Baris ^b   Garcia, Caesar T ^b   Degertekin, F Levent ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Acceleration measurement; Diffraction; Feedback system; Optical interferometry

Indexed keywords

COHERENT LIGHT; DIFFRACTION GRATINGS; ELECTROSTATIC ACTUATORS; FEEDBACK CONTROL; INTERFEROMETRY; OPTICAL RESOLVING POWER; PHOTODETECTORS; READOUT SYSTEMS; SURFACE EMITTING LASERS;

DIFFRACTION-BASED OPTICAL DETECTION; INTERFEROMETRIC DETECTION RESOLUTION;

ACCELEROMETERS;

EID: 40449113554     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.910243     Document Type: Article

References (20)

1. C. H. Liu and T. W. Kenny, "A high-precision, wide-bandwidth micromachined tunneling accelerometer," J. Microelectromech. Syst. vol. 10, no. 3, pp. 425-433, Sep. 2001.
2. W. T. Park, A. Partridge, R. N. Candler, V. Ayanoor-Vitikkate, G. Yama, M. Lutz, and T. W. Kenny, "Encapsulated submillimeter piezoresistive accelerometers," J. Microelectromech. Syst., vol. 15, no. 3, pp. 507-514, Jun. 2006.
3. O. Bochobza-Degani, R. Yechieli, S. Bar-Lev, U. B. Yehuda, and Y. Nemirovsky, "Characterization of a novel micromachined accelerometer with enhanced-MIDOS," in Proc. 12th Int. Conf. Transducers, 2003, pp. 1395-1398.
4. 3 interferometric accelerometer with nano-g resolution," J. Microelectromech. Syst., vol. 11, no. 3, pp. 182-187, Jun. 2002.
5. N. A. Hall, B. Bicen, M. K. Jeelani, W. Lee, S. Qureshi, M. Okandan, and F. L. Degertekin, "Micromachined microphones with diffraction-based optical displacement detection," J. Acoust. Soc. Amer., vol. 118, no. 5, pp. 3000-3009, Nov. 2005.
6. N. A. Hall, W. Lee, and F. L. Degertekin, "Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection," IEEE Trans. Ultrason., Ferroelectr, Freq. Control, vol. 50, no. 11, pp. 1570-1580, Nov. 2003.
7. A. G. Onaran, M. Balantekin, W. Lee, W. L. Hughes, B. A. Buchine, R. O. Guldiken, Z. Parlak, C. F. Quate, and F. L. Degertekin, "A new atomic force microscope probe with force sensing integrated readout and active tip," Rev. Sci. Instrum., vol. 77, no. 2, pp. 023 501.1-023 501.7, Feb. 2006.
8. W. Lee, N. A. Hall, Z. Zhou, and F. L. Degertekin, "Fabrication and characterization of a micromachined acoustic sensor with integrated optical readout," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 643-651, May/Jun. 2004.
9. V. R. Yarberry, "Meeting the MEMS "design-to-analysis" challenge: The summit V design tool environment," in Proc. Amer. Soc. Mech. Eng., MEMS Division Publication, 2002, pp. 547-553.
10. S. Eitel, S. J. Fancey, H. P. Gauggel, K. H. Gulden, W. Bachtold, and M. R. Taghizadeh, "Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays," IEEE Photon. Technol. Lett., vol. 12, no. 5, pp. 459-461, May 2000.
11. D. Serkland, K. M. Geib, A. A. Allerman, and T. Hargett, "Monolithic integration of vertical-cavity surface-emitting lasers and wavelength-shifted resonant-cavity photodetectors," in Proc. Conf. LEOS Annu. Meeting, San Diego, CA, 2001, pp. 566-567.
12. D. Serkland, G. R. Hadley, A. J. Fischer, K. M. Geib, A. A. Allerman, and K. D. Choquette, "Progress on vertical cavity surface-emitting lasers," in Proc. III-Nitride Based Semicond. Electron. Opt. Devices 34th State-of-the-Art-Program Compound Semicond., Washington, DC, 2001.
13. Y. T. Cheng, L. W. Lin, and K. Najafi, "Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging," J. Microelectromech. Syst., vol. 9, no. 1, pp. 3-8, Mar. 2000.
14. P. Monajemi, P. J. Joseph, P. A. Kohl, and F. Ayazi, "Wafer-level MEMS packaging via thermally released metal-organic membranes," J. Micromech. Microeng., vol. 16, no. 4, pp. 742-750, Apr. 2006.
15. T. B. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, no. 5, pp. 903-909, May 1993.
16. J. Mertz, O. Marti, and J. Mlynek, "Regulation of a microcantilever response by force feedback," Appl. Phys. Lett., vol. 62, no. 19, pp. 2344-2346, May 10, 1993.
17. K. J. Bruland, J. L. Garbini, W. M. Dougherty, and J. A. Sidles, "Optimal control of ultrasoft cantilevers for force microscopy," J. Appl. Phys., vol. 83, no. 8, pp. 3972-3977, Apr. 15, 1998.
18. T. Sulchek, R. Hsieh, J. D. Adams, G. G. Yaralioglu, S. C. Minne, C. F. Quate, J. P. Cleveland, A. Atalar, and D. M. Adderton, "High-speed tapping mode imaging with active Q control for atomic force microscopy," Appl. Phys. Lett., vol. 76, no. 11, pp. 1473-1475, Mar. 13, 2000.
19. B. E. Boser and R. T. Howe, "Surface micromachined accelerometers," IEEE J. Solid-State Circuits, vol. 31, no. 3, pp. 366-375, Mar. 1996.
20. K. H. L. Chau, S. R. Lewis, Y. Zhao, R. T. Howe, S. F. Bart, and R. G. Marcheselli, "An integrated force-balanced capacitive accelerometer for low-g applications," Sens. Actuators A, Phys., vol. 54, no. 1-3, pp. 472-476, Jun. 1996.