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Volumn , Issue , 2002, Pages 547-553

Meeting the MEMS 'design-to-analysis' challenge: The summit® V design tool environment

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; THREE DIMENSIONAL;

EID: 78249240952     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-39205     Document Type: Conference Paper
Times cited : (7)

References (11)
  • 7
    • 0242665125 scopus 로고    scopus 로고
    • MEMS Design Rule Checking: A batch approach for remote operation
    • V.R. Yarberry, "MEMS Design Rule Checking: a batch approach for remote operation", SPIE 3328, 32-39, 1998.
    • (1998) SPIE , vol.3328 , pp. 32-39
    • Yarberry, V.R.1
  • 10
    • 0242444150 scopus 로고
    • Mentor Graphics Corporation
    • Mentor Graphics Corporation, ICverify Manual, 1994.
    • (1994) ICverify Manual


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.