Characteristics of a ferromagnetic-enhanced inductively-coupled plasma by an internal linear antenna

Journal of the Korean Physical Society

Volumn 52, Issue 2, 2008, Pages 313-317

  Lim, Jong Hyeuk ^a   Kim, Kyong Nam ^a   Park, Jung Kyun ^a   Yeom, Geun Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Ferromagnetic; Inductively coupled plasma; Internal antenna

Indexed keywords

EID: 40049101117     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.52.313     Document Type: Article

References (15)

1. G. D. Hong, J. Korean Phys. Soc. 44, 1000 (2004).
2. U. Kortshagan, N. D. Gibson and J. E. Lawler, J. Phys. D: Appl. Phys. 29, 1224 (1996).
3. T. Intrator and J. Menard, Plasma Source Sci. Technol. 5, 371 (1996).
4. K. N. Kim and G. Y. Yeon, J. Korean Phys. Soc. 48, 422 (2006).
5. K. Suzuki, K. Nakamura, H. Ohkubo and H. Sugai, Plasma Source Sci. Technol. 7, 13 (1998).
6. K. N. Kim, M. S. Kim and G. Y. Yeom, Appl. Phys. Lett. 88, 161503 (2006).
7. M. Watanabe, D. M. Shaw and G. J.Collins, J. Appl. Phys. 85, 3428 (1999
8. S. H. Kim, J. M. Park and S. H. Hong, J. Korean Phys. Soc. 46, 855 (2005).
9. T. Meziani, P. Colpo and F. Rossi, Plasma Source Sci. Technol. 10, 276 (2001).
10. K. Takenaka, Y. Setsuhara, K. Nishisaka and A. Ebe, Jpn. J. Appl. Phys. 45, 8046 (2006).
11. Hewitt J, Appl. Phys. 40, 1464, (1969).
12. K. Takata, Tomiyama and Shiroishi, J. Magn. Magn. Mater. 269, 131 (2004).
13. J. N. Kim, H. Y. Lee and D. K. Lee, Surf. Coat. Technol. 201, 5442 (2007).
14. V. Godyak and C. W. Chung, Jpn. J. Appl. Phys. 45, 8035 (2006).
15. K. N. Kim and G. Y. Yeon, J. Korean Phys. Soc. 48, 256 (2006).