Modelling and optimization of inductively coupled loop antenna plasma sources

Plasma Sources Science and Technology

Volumn 5, Issue 3, 1996, Pages 371-382

  Intrator, T ^a   Menard, J ^a,b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b PRINCETON PLASMA PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; ION BOMBARDMENT; IONIZATION OF GASES; LOOP ANTENNAS; PLASMA DENSITY;

INDUCTIVELY COUPLED PLASMA SOURCES; SOFTWARE PACKAGE ANTENA;

PLASMA SOURCES;

EID: 0030204810     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/3/004     Document Type: Article

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