Plasma and electrical characteristics of a novel internal linear inductively coupled plasma source for flat panel display applications

Journal of the Korean Physical Society

Volumn 48, Issue 3, 2006, Pages 422-426

  Kim, Kyong Nam ^a   Yeom, Geun Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Display; Etching; Large area; Plasma

Indexed keywords

EID: 33645508519     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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