Radio-frequency plasma potential variations originating from capacitive coupling from the coil antenna in inductively coupled plasmas

Journal of Applied Physics

Volumn 85, Issue 7, 1999, Pages 3428-3434

  Watanabe, M ^a   Shaw, D M ^a   Collins, G J ^a   Sugai, H ^b  

^a Engineering Research Center and Hydraulics Laboratory   (United States)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013536161     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369700     Document Type: Article

References (22)

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