Characteristics of a large-area plasma source using internal multiple U-type antenna

Journal of the Korean Physical Society

Volumn 48, Issue 2, 2006, Pages 256-259

  Kim, Kyong Nam ^a   Yeom, Geun Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Antenna; Density; Langmuir; Plasma

Indexed keywords

EID: 33644885288     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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