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Volumn 99, Issue 7-8, 2007, Pages 15-20

Effect of N2 partial pressure on the growth of chromium nitride coatings

Author keywords

AES; Chromium nitride; Reactive magnetron sputtering; Wear; XPS; XRD

Indexed keywords

CHROMIUM NITRIDE; GROWN FILMS; REACTIVE MAGNETRON SPUTTERING;

EID: 39349109774     PISSN: 00260843     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (1)

References (36)
  • 13
    • 39349108746 scopus 로고    scopus 로고
    • J.L. Vossen and J.J. Cuomo, Glow discharge sputter deposition in: Thin film processes - J.J. Vossen and W. Kern Academic Press, Inc. (1978).
    • J.L. Vossen and J.J. Cuomo, Glow discharge sputter deposition in: Thin film processes - J.J. Vossen and W. Kern Academic Press, Inc. (1978).
  • 18
    • 39349109438 scopus 로고    scopus 로고
    • The reported the energy position of Cr compounds are taken as the average of following the reported peak position: Esaka et. al. J.Vac. Sci. Technol. A 15(5) 2521 1997
    • The reported the energy position of Cr compounds are taken as the average of following the reported peak position: Esaka et. al. J.Vac. Sci. Technol. A 15(5) 2521 (1997)
  • 19
    • 24644434946 scopus 로고    scopus 로고
    • Sur. & Coat.
    • C
    • A. Lippitz et. al. Sur. & Coat. Techn. 200, 250 (2005), C.
    • (2005) Techn , vol.200 , pp. 250
    • Lippitz, A.1    et., al.2
  • 24
    • 39349110378 scopus 로고    scopus 로고
    • The reported the energy position of N compounds are taken as the average of following the reported value: Esaka et. al. J.Vac. Sci. Technol. A 15(5) 2521 1997
    • The reported the energy position of N compounds are taken as the average of following the reported value: Esaka et. al. J.Vac. Sci. Technol. A 15(5) 2521 (1997)
  • 25
    • 24644434946 scopus 로고    scopus 로고
    • Sur. & Coat.
    • A. Lippitz et. al. Sur. & Coat. Techn. 200, 250 (2005)
    • (2005) Techn , vol.200 , pp. 250
    • Lippitz, A.1    et., al.2
  • 31
    • 1342310210 scopus 로고    scopus 로고
    • To extimate the internal stress of the growth film we have used a value of E = 280 GPa and v = 0.3: R. Hoy, W.G. Sloof and G.C.A.M. Janssen Surf, and Coat. Technol., 179, 215-222 (2004).
    • To extimate the internal stress of the growth film we have used a value of E = 280 GPa and v = 0.3: R. Hoy, W.G. Sloof and G.C.A.M. Janssen Surf, and Coat. Technol., 179, 215-222 (2004).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.