On the multistep ionizations in an argon inductively coupled plasma

Physics of Plasmas

Volumn 13, Issue 5, 2006, Pages

  Lee, Min Hyong ^a   Jang, Sung Ho ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTRON ENERGY ANALYZERS; INDUCTIVELY COUPLED PLASMA; MATHEMATICAL MODELS; THERMAL EFFECTS;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); ELECTRON TEMPERATURE; MULTISTEP IONIZATIONS; PLASMA PARAMETERS;

IONIZATION;

EID: 33744794340     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2193535     Document Type: Article

References (32)

1. M. A. Lieberman, V. A. Godyak, IEEE Trans. Plasma Sci. 26, 955 (1998).
2. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 2nd ed. (Wiley, New York, 2004).
3. J. Hopwood, C. R. Guarnieri, S. J. Whitehair, and J. J. Cuomo, J. Vac. Sci. Technol. A 11, 152 (1993).
4. M. S. Barnes, J. C. Forster, and J. H. Keller, Appl. Phys. Lett. 62, 2622 (1993).
5. J. Hopwood, Appl. Phys. Lett. 62, 940 (1993).
6. J. A. O'Neil, M. S. Barnes, and J. H. Keller, J. Appl. Phys. 73, 1621 (1993).
7. J. Hopwood, Plasma Sources Sci. Technol. 1, 109 (1992).
8. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 11, 525 (2002).
9. Dimitris P. Lymberopoulos and Demetre J. Economou, J. Appl. Phys. 73, 3668 (1993).
10. G. A. Hebner, J. Appl. Phys. 80, 3215 (1996).
11. M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrovic, and T. Makabe, Phys. Rev. E 58, 7823 (1998).
12. A. Okigawa, M. Tadokoro, A. Itoh, N. Nakano, Z. Lj. Petrovic, and T. Makabe, Jpn. J. Appl. Phys., Part 1 36, 4605 (1997).
13. T. Sato and T. Makabe, J. Appl. Phys. 97, 113304 (2005).
14. F. Tochikubo, Z. Lj. Petrovic, N. Nakano, and T. Makabe, Jpn. J. Appl. Phys., Part 1 33, 4271 (1994).
15. M. H. Lee and C. W. Chung, Phys. Plasmas 12, 73501 (2005).
16. M. H. Lee and C. W. Chung, Appl. Phys. Lett. 87, 131502 (2005).
17. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992).
18. C. W. Chung, S. S. Kim, and H. Y. Chang, Phys. Rev. E 69, 016406 (2004).
19. J. I. Fernandez Palop, J. Ballesteros, V. Colomer, and M. A. Hernandez, Rev. Sci. Instrum. 66, 4625 (1995).
20. J. Hopwood, Plasma Sources Sci. Technol. 3, 460 (1994).
21. W. F. Edigell, Argon, Helium and the Rare Gases (Interscience, New York, 1961), p. 132.
22. Sumio Ashida, C. Lee, and M. A. Lieberman, J. Vac. Sci. Technol. A 13, 2498 (1995).
23. F. Kannari, M. Obaraa, and T. Fujioka, J. Appl. Phys. 57, 4309 (1985).
24. N. L. Bassett and D. J. Economou, J. Appl. Phys. 75, 1931 (1993).
25. David R. Lide, CRC Handbook of Chemistry and Physics, 80th ed. (CRC Press, Boca Raton, 2000).
26. N. Sadeghi-Kharrazi, thesis, Grenobel, 1974 (unpublished).
27. V. A. Godyak, Soviet Radio Frequency Discharge Research (Delphic Associates, Falls Church, 1986).
28. K. Suzuki, K. Nakamura, H. Ohkubi, and H. Sugai, Plasma Sources Sci. Technol. 7, 13 (1998).
29. U. Kortshagen, N. D. Gibson, and J. E. Lawler, J. Phys. D 29, 1224 (1996).
30. Y. Miyoshi, Z. Lj. Petrovic, and T. Makabe, J. Phys. D 35, 454 (2002).
31. V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990).
32. C. W. Chung and H. Y. Chang, Appl. Phys. Lett. 80, 1725 (2002).