Green-tape ceramics. New technological approach for integrating electronics and fluidics in microsystems

TrAC - Trends in Analytical Chemistry

Volumn 27, Issue 1, 2008, Pages 24-33

  Ibáñez García, Núria ^a   Martínez Cisneros, Cynthia S ^b   Valdés, Francisco ^b   Alonso, Julián ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO TECNOLÓGICO DE LA LAGUNA   (Mexico)

Author keywords

Electronics; Fluidics; Integration; Low temperature co fired ceramics; LTCC; Miniaturization

Indexed keywords

CERAMIC MATERIALS; FLUIDICS; MICROANALYSIS; MICROELECTRONICS;

CHEMICAL MICROANALYZERS; LOW TEMPERATURE CO FIRED CERAMICS; MINIATURIZATION;

MICROSYSTEMS;

ANALYTIC METHOD; ARTICLE; CERAMICS; CHEMICAL ANALYSIS; ELECTRONIC SENSOR; ELECTRONICS; GREEN TAPE CERAMICS; MICROANALYSIS; PRIORITY JOURNAL; SIGNAL PROCESSING; TEMPERATURE DEPENDENCE;

EID: 39149145836     PISSN: 01659936     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.trac.2007.11.002     Document Type: Article

References (71)

1. Manz A., Graber N., and Widmer H.M. Sens. Actuators, B 1 (1990) 244
2. Reyes D.R., Iossifidis D., Auroux P.A., and Manz A. Anal. Chem. 74 (2002) 2623
3. Auroux P.A., Iossifidis D., Reyes D.R., and Manz A. Anal. Chem. 74 (2002) 2637
4. Gonzalez C., Collins S.D., and Smith R.L. Sens. Actuators, B 49 (1998) 40
5. Santra S., Holloway P., and Batich C.D. Sens. Actuators, B 87 (2002) 358
6. Nguyen N.T., and Huang X.Y. Sens. Actuators, A 88 (2001) 104
7. Ohori T., Shoji S., Miura K., and Yotsumoto A. Sens. Actuators, A 64 (1998) 57
8. Jeon N.L., Chiu D.T., Wargo C.J., Wu H.K., Choi I.S., Anderson J.R., and Whitesides G.M. Biomed. Microdevices 4 (2002) 117
9. Zhang C.X., and Manz A. Anal. Chem. 73 (2001) 2656
10. Greenway G.M., Haswell S.J., and Petsul P.H. Anal. Chim. Acta 387 (1999) 1
11. Bertsch A., Heimgartner S., Cousseau P., and Renaud P. Lab Chip 1 (2001) 56
12. Woolley A.T., Hadley D., Landre P., de Mello A.J., Mathies R.A., and Northrup M.A. Anal. Chem. 68 (1996) 4081
13. Andersson H., van der Wijngaart W., Enoksson P., and Stemme G. Sens. Actuators, B 67 (2000) 203
14. Fintschenko Y., and van den Berg A. J. Chromatogr., A 819 (1998) 3
15. Wang J. Trends Anal. Chem. 21 (2002) 226
16. Puyol M., del Valle M., Garces I., Villuendas F., Dominguez C., and Alonso J. Anal. Chem. 71 (1999) 5037
17. Petersen K.E. Proc. IEEE 70 (1982) 420
18. Thornell G., and Johansson S. J. Micromech. Microeng. 8 (1998) 251
19. Becker H., and Locascio L.E. Talanta 56 (2002) 267
20. Lai S., Cao X., and Lee L.J. Anal. Chem. 76 (2004) 1175
21. Leatzow D.M., Dodson J.M., Golden J.P., and Ligler F.S. Biosens. Bioelectron. 17 (2002) 105
22. Wang H.Y., Foote R.S., Jacobson S.C., Schneibel J.H., and Ramsey J.M. Sens. Actuators, B 45 (1997) 199
23. Gongora-Rubio M., Sola-Laguna L.M., Moffett P.J., and Santiago-Aviles J.J. Sens. Actuators, A 73 (1999) 215
24. Hrovat M., Holc J., Drnovsek S., Belavic D., Bernard J., Kosec M., Golonka L., Dziedzic A., and Kita J. J. Mater. Sci. 22 (2003) 1193
25. Golonka L.J., Buczek M., Hrovat M., Belavic D., Dziedzic A., Roguszczak H., and Zawada T. Microelectron. Int. 22 (2005) 13
26. Gebhardt S., Seffner L., Schlenkrich F., and Schonecker A. J. Eur. Ceram. Soc. 27 (2007) 4177
27. Schmid U., and Seidel H. Sens. Actuators, A 130 (2006) 194
28. Hrovat M., Belavic D., Kita J., Cilensek J., Golonka L., and Dziedzic A. J. Eur. Ceram. Soc. 25 (2005) 3443
29. Imanaka Y., Hayashi N., Takenouchi M., and Akedo J. J. Eur. Ceram. Soc. 27 (2007) 2789
30. Roosen A. J. Eur. Ceram. Soc. 21 (2001) 1993
31. DuPont Green Tape Material System Design and Layout Guidelines [Please give full reference].
32. C. Scranton, J. Lawson, in: Proc. Radio and Wireless Conference (RAWCON), 1999, 194.
33. F.K. Patterson, J.E. Gantzhorn, T.P. Daly, J.R. Rellick, M. Iwabuchi, S. Kawasaki, in: IEMT Symposium, 1989, 147.
34. Mohanram A., Lee S.H., Messing G.L., and Green D.J. J. Am. Ceram. Soc. 89 (2006) 1923
35. Gongora-Rubio M.R., Fontes M.B.A., da Rocha Z.M., Richter E.M., and Angnes L. Sens. Actuators, B 103 (2004) 468
36. Pisarkiewicz T., Sutor A., Potempa P., Maziarz W., Thust H., and Thelemann T. Thin Solid Films 436 (2003) 84
37. Schmid U. Sens. Actuators, A 97 (2002) 253
38. Wilde J., and Lai Y.Q. Microelectron. Reliab. 43 (2003) 345
39. Fonseca M.A., English J.M., von Arx M., and Allen M.G. J. Microelectromech. Syst. 11 (2002) 337
40. Teterycz H., Kita J., Bauer R., Golonka L.J., Licznerski B.W., Nitsch K., and Wisniewski K. Sens. Actuators, B 47 (1998) 100
41. Voß T., Gründler P., Kirbs A., and Flechsig G.U. Electrochem. Commun. 1 (1999) 383
42. Golonka L.J., Zawada T., Radojewski J., Roguszczak H., and Stefanow M. Int. J. Appl. Ceram. Technol. 3 (2006) 150
43. Golonka L.J., Roguszczak H., Zawada T., Radojewski J., Grabowska I., Chudy M., Dybko A., Brzozka Z., and Stadnik D. Sens. Actuators, B 111 (2005) 396
44. N. Ibáñez-García, J.A. Chamarro, Z.M. da Rocha, M.R.G. Rubio, in: IMAPS/ACERS 1st Int. Conf. Exhibit. Ceramic Interconnect Ceramic Microsyst. Technol. (CICMT), Baltimore, MD, USA, 2005.
45. N. Ibáñez-García, C.M. Azevedo, M. Puyol, F. Villuendas, J.A. Chamarro, in: 10th Int. Conf. Flow Anal., 2006, Portugal, 2006.
46. Ibañez-Garcia N., Machado Gonçalves R.D., Mendes da Rocha Z., Góngora-Rubio M.R., Seabra A.C., and Chamarro J.A. Sens. Actuators, B 118 (2006) 67
47. Ibañez-Garcia N., Mercader M.B., da Rocha Z.M., Seabra C.A., Gongora-Rubio M.R., and Chamarro J.A. Anal. Chem. 78 (2006) 2985
48. Llopis X., Ibanez-Garcia N., Alegret S., and Alonso J. Anal. Chem. 79 (2007) 3662
49. Henry C.S., Zhong M., Lunte S.M., Kim M., Bau H., and Santiago J.J. Anal. Commun. 36 (1999) 305
50. Dernovsek O., Naeini A., Preu G., Wersing W., Eberstein M., and Schiller W.A. J. Eur. Ceram. Soc. 21 (2001) 1693
51. Wang Y., Zhang G., and Ma J. Mater. Sci. Eng., B 94 (2002) 48
52. Gongora-Rubio M.R., Espinoza-Vallejos P., Sola-Laguna L., and Santiago-Avilés J.J. Sens. Actuators, A 89 (2001) 222
53. Hrovat M., Belavic D., Kita J., Holc J., Drnovsek S., Cilensek J., Golonka L., and Dziedzic A. Microelectron. Int. 23 (2006) 33
54. Tait R.B., Humphries R., and Lorenz J. IEEE Trans. Ind. Appl. 30 (1994) 573
55. Jantunen H., Kangasvieri T., Vahakangas J., and Leppavuori S. J. Eur. Ceram. Soc. 23 (2003) 2541
56. Bau H.H., Zhu J., Qian S., and Xiang Y. Sens. Actuators, B 88 (2003) 205
57. Zhong J., Yi M., and Bau H.H. Sens. Actuators, A 96 (2002) 59
58. Li J., and Ananthasuresh G.K. J. Micromech. Microeng. 12 (2002) 198
59. Chou C.F., Changrani R., Roberts P., Sadler D., Burdon J., Zenhausern F., Lin S., Mulholland A., Swami N., and Terbrueggen R. Microelectron. Eng. 921 (2002) 61
60. Chiou J., Matsudaira P., Sonin A., and Ehrlich D. Anal. Chem. 73 (2001) 2018
61. G. Bischoff, H. Thust, T. Thelemann, T. Kirchner, in: Int. Symp. Microelectron. (1999) 636.
62. Martínez-Cisneros C.S., Ibáñez-García N., Valdés F., and Alonso J. Sens. Actuators, A 138 (2007) 63
63. Kim K.I., Kim J.M., Hwang G.C., Baek C.W., and Kim Y.K. J. Micromech. Microeng. 16 (2006) 150
64. Rusu C., Persson K., Ottosson B., and Billger D. J. Micromech. Microeng. 16 (2006) 13
65. Martínez-Cisneros C.S., Ibáñez-García N., Valdés F., and Alonso J. Anal. Chem. 79 (2007) 8376
66. Rohwedder J.J.R., Pasquini C., Raimundo Jr. I.M., Conceiçao M., Montenegro B.S.M., Araújo A.N., and Couto C.M.C.M. J. Autom. Methods Manag. Chem. 24 (2002) 105
67. Avdikos E.M., Prodromidis M.I., and Efstathiou C.E. Sens. Actuators, B 107 (2002) 372
68. Steinberg M.D., and Lowe C.R. Sens. Actuators, B 97 (2004) 284
69. Lau K.T., Baldwin S., O'Toole M., Shepherd R., Yerazunis W.J., Izuo S., Ueyama S., and Diamond D. Anal. Chim. Acta 557 (2006) 111
70. Yang L., Egawa M., Akimoto M., and Miyakawa M. Opt. Rev. 10 (2003) 554
71. Moilanen V., Kemppainen A., Malinen J., Kansakoski M., and Marbach R. Meas. Sci. Technol. 15 (2004) 2188