Microsensor based on low temperature cofired ceramics and gas-sensitive thin film

Thin Solid Films

Volumn 436, Issue 1, 2003, Pages 84-89

  Pisarkiewicz, T ^a   Sutor, A ^b   Potempa, P ^a   Maziarz, W ^a   Thust, H ^b   Thelemann, T ^b  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Gas sensor; In2O3; LTCC technology; SnO2

Indexed keywords

CERAMIC MATERIALS; CHEMICAL SENSORS; CONTROL EQUIPMENT; DEPOSITION; DIGITAL CONTROL SYSTEMS; ELECTRODES; HEAT TREATMENT; LOW TEMPERATURE EFFECTS; MICROSENSORS;

GAS-SENSITIVE THIN FILMS;

THIN FILMS;

EID: 0037702865     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00514-5     Document Type: Conference Paper

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