Transparent and conductive ZnO:Al thin films grown by pulsed magnetron sputtering in current or voltage regulation modes

Vacuum

Volumn 82, Issue 6, 2008, Pages 668-672

  Guillen C ^a   Herrero, J ^a  

^a CIEMAT   (Spain)

Author keywords

Electrical properties; Optical properties; Sputtering; Zinc oxide

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; ZINC OXIDE;

CERAMIC OXIDES; PULSING FREQUENCY; SUBSTRATE TEMPERATURES; VISIBLE TRANSMITTANCE;

THIN FILMS;

EID: 38949176793     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.10.013     Document Type: Article

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