Heating of polymer substrate by discharge plasma in radiofrequency magnetron sputtering deposition

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1334-1339

  Sirghi, Lucel ^a   Popa, Gheorghe ^a   Hatanaka, Yoshinori ^b  

^a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^b AICHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Polymer surface; Radiofrequency magnetron sputtering deposition; Substrate heating; Surface buckling instability

Indexed keywords

BUCKLING; ION BOMBARDMENT; MAGNETRON SPUTTERING; PLASMAS; THIN FILMS;

POLYMER SURFACE; RADIOFREQUENCY MAGNETRON SPUTTERING DEPOSITION; SUBSTRATE HEATING; SURFACE BUCKLING INSTABILITY;

POLYMERS;

EID: 33750813543     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.059     Document Type: Article

References (16)

1. Kerstein H., Deutsch H., Steffen H., Kroesen G.M.W., and Hippler R. Vacuum 63 (2001) 385
2. Ulrickson M. J. Vac. Sci. Technol., A 4 (1986) 1805
3. Shinohara M., Toshiro H., Saio K., Arai K., and Takayama K. J. Vac. Sci. Technol., A 8 (1990) 3954
4. Garbassi F., Morra M., and Occhiello E. Polymer Surfaces: From Physics to Technology (1998), John Wiley and Sons, NY, USA
5. Arefi-Khonsari F., Kurdi J., Tatoulian M., and Amouroux J. Surf. Coat. Technol. 142-144 (2001) 437
6. Castner D., and Ratner B. Surf. Sci. 500 (2000) 28
7. Bowden N., Huck W.T.S., Paul K.E., and Whitesides G.M. Appl. Phys. Lett. 75 (1999) 2557
8. Zhao S., Denes F., Manolache S., and Carpick R.W. Proceedings of the 2002 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, Milwaukee, WI, U.S.A., June 10-12 (2002) 162
9. Coen M.C., Lehmann R., Groening P., and Schlapbach L. Appl. Surf. Sci. 207 (2003) 276
10. Biersack J.P. In: Mazzoldi P., and Arnold G.W. (Eds). Ion Beam Modification of Insulators (1987), Elsevier, Amsterdam
11. Liston E. J. Adhes. 30 (1989) 199
12. Piejak R., Godyak V., Alexandrovich B., and Tishchenko N. Plasma Sources Sci. Technol. 7 (1998) 590
13. Stamate E., Sugai H., and Ohe K. Appl. Phys. Lett. 80 (2002) 3066
14. Sirghi L., Aoki T., and Hatanaka Y. Thin Solid Films 422 (2002) 55
15. Sirghi L., and Hatanaka Y. Surf. Sci. 530 (2003) L323
16. Coen M.C., Nowak S., Kuttel O.M., and Groening P. Appl. Surf. Sci. 103 (1996) 27