Electron heating in multiple-frequency capacitive discharges

Plasma Physics and Controlled Fusion

Volumn 48, Issue 12 B, 2006, Pages

  Chabert, P ^a   Levif, P ^a   Raimbault, J L ^a   Rax, J M ^a   Turner, M M ^b   Lieberman, M A ^c  

^a ECOLE POLYTECHNIQUE   (France)

^b DUBLIN CITY UNIVERSITY   (Ireland)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGES; ELECTRODE SIZE; ELECTROMAGNETIC EFFECTS; ELECTRON HEATING; HIGH-FREQUENCY VOLTAGE; HIGHER FREQUENCIES; INDEPENDENT CONTROL; INDUCTIVE FIELD; ION ENERGIES; ION FLUXES; MULTIPLE FREQUENCY;

ELECTROMAGNETIC FIELD EFFECTS; PLASMA HEATING;

ELECTRIC DISCHARGES;

EID: 38849207166     PISSN: 07413335     EISSN: 13616587     Source Type: Journal    
DOI: 10.1088/0741-3335/48/12B/S22     Document Type: Article

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