Dry etching of CuCrO 2 thin films

Applied Surface Science

Volumn 254, Issue 8, 2008, Pages 2359-2363

  Lim, W T ^a   Sadik, P W ^a   Norton, D P ^a   Pearton, S J ^a   Ren, F ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

CuCrO 2; Etching; Surface morphology

Indexed keywords

DRY ETCHING; HOLE MOBILITY; OXIDE FILMS; THIN FILMS;

CHUCK VOLTAGES; DRY ETCH PATTERNING; PLASMA CHEMISTRY; THRESHOLD ION ENERGY;

COPPER COMPOUNDS;

EID: 38749102424     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.09.034     Document Type: Article

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